2010 Fiscal Year Final Research Report
Fabrication of highly-functional polymer surface using very-low-potential plasma and its evaluation
| Project/Area Number |
21760587
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Material processing/treatments
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| Research Institution | Osaka University |
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Principal Investigator |
TAKENAKA Kosuke Osaka University, 接合科学研究所, 助教 (60432423)
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| Project Period (FY) |
2009 – 2010
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| Keywords | プラズマ処理・レーザー加工 / 機能性表面 / 表面改質・加工 |
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| Research Abstract |
For fabrication of highly-functional polymer surface, modification of plasma surface modification has been performed using inductivity-coupled plasma sources have been developed with multiple low-inductance antenna (LIA) modules, which have allowed low-voltage operation of ICPs. Non-destructive depth analysis of chemical bonding states showed that low-potential ICP of argon/oxygen mixture gas resulted in oxidation of polymer surface only in a few nm regions, without degradation beneath the 10nm depth by oxygen radicals or ions. Surface roughness of the polymer slightly increased with increasing ion dose, while the average peak interval considerably decreased with ion dose. These results indicate the feasibility of control of structure and chemical bonding state of polymer surface via controlling the plasma.
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[Journal Article] Plasma Surface Treatment of Polymers with Inductivity Coupled RF Plasmas Driven by Low inductance Antenna Units,2009
Author(s)
Y.Setsuhara, K.Cho, K.Takenaka, A.Ebe, M.Shiratani, M.Sekine, M.Hori, E.Ikeitaga, H.Kondo, O.Nakatsuka, S.Zaima
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Journal Title
Thin Solid Films 518
Pages: 1006-1011
Peer Reviewed
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