2010 Fiscal Year Final Research Report
Development of MEMS Tunable Color Filter Based on Sub-wavelength Grating
| Project/Area Number |
21810013
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| Research Category |
Grant-in-Aid for Research Activity Start-up
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| Allocation Type | Single-year Grants |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | Toyohashi University of Technology |
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Principal Investigator |
TAKAHASHI Kazuhiro Toyohashi University of Technology, 大学院・工学研究科, 助教 (90549346)
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| Project Period (FY) |
2009 – 2010
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| Keywords | NEMS / MEMS / サブ波長格子 / ナノフォトニクス / CMOS集積回路 / 静電アクチュエータ / 構造色 |
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| Research Abstract |
We propose a MEMS (Micro Electro Mechanical Systems) tunable color filter using sub-wavelength grating, which can modulate the reflected light by changing the period of the sub-wavelength grating pixel by means of electrostatic actuation. We report the mechanical design of the MEMS actuator, optical design of the sub-wavelength grating, and device fabrication technique using a semiconductor technology. The MEMS electrostatic actuator could be designed a high mechanical resonance frequency with a relatively low drive voltage. The structural color was found from the fabricated sub-wavelength grating integrated with the MEMS actuator on a silicon wafer. The color tuning from yellow to green was demonstrated by voltage operation. We also developed a monolithic integration technique of the MEMS tunable color filter and LSI circuits. The fabricated driver circuits were successfully operated.
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