Development of near-field optical conjugation lens for high-speed and high-resolution manufacturing

2023 Fiscal Year Final Research Report

• Project/Area Number: 21H01226
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: Shizuoka University
• Principal Investigator: Usuki Shin 静岡大学, 電子工学研究所, 准教授 (60508191)
• Co-Investigator(Kenkyū-buntansha): 關根 惟敏 静岡大学, 工学部, 准教授 (00765993) ; 三浦 憲二郎 静岡大学, 創造科学技術大学院, 教授 (50254066)
• Project Period (FY): 2021-04-01 – 2024-03-31
• Keywords: 近接場光学 / 位相共役 / 散乱レンズ / 光パターニング / 光造形 / 光ピンセット / 構造化照明 / 超解像

Outline of Final Research Achievements

Photolithography, a typical high-resolution optical processing technology, requires photomask creation and exchange, and near-field optical microscopy, a typical high-resolution optical measurement technology, requires probe scanning, which generally involves a trade-off between resolution and speed (efficiency). In this study, we propose a near-field scattering lens for high-resolution optical patterning by extending our originally developed sub-wavelength focused spot generation technique using near-field optical phase conjugation. Throughout the research period, we have conducted research and development on the small light sources using a near-field optical probe, measurement of wavefronts of the scattered light, superposition of phase maps and calculation of phase conjugation, and regeneration of phase conjugated light.

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Free Research Field

光計測、生産工学・加工学

Academic Significance and Societal Importance of the Research Achievements

本研究では，位相共役光学と近接場光学の融合により，光パターニング技術における空間分解能とスピードのトレードオフ問題の解決可能性を示した．これにより，生産加工，ナノテクノロジ，ライフサイエンス，など多くの分野において，マスクレスフォトリソグラフィ，スキャンレス近接場光学顕微鏡，高速・高分解能光ピンセットといった画期的なイノベーションの創出が可能となる．さらに，レーザホログラフィやプラズモニクスといった先端フォトニクスとの高い親和性を考慮すると，本研究成果は学術的にも社会的にも意義深いものである．