SiC mold cutting, LIPSS formation, and graphene coating for high-performance glass optics

2023 Fiscal Year Final Research Report

• Project/Area Number: 21H01230
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: Keio University
• Principal Investigator: Yan Jiwang 慶應義塾大学, 理工学部(矢上), 教授 (40323042)
• Project Period (FY): 2021-04-01 – 2024-03-31
• Keywords: ガラス成形 / 超硬合金 / 金型加工 / グラフェン成膜 / 超精密切削 / 反応焼結SiC / ナノ周期構造 / マイクロレンズアレイ

Outline of Final Research Achievements

Reaction-bonded silicon carbide (SiC) was used as a mold material for press molding of glass micro lens arrays. An ultraprecision machine tool equipped with a slow tool servo system was used for cutting the micro lens array structures on the mold surface, and a femtosecond pulsed laser was used to generate periodical surface nanostructures (LIPSS) on the mold surface. Then, a nano-graphite thin film was coated on the mold surface as a mold release coating by using the air-pressure CVD method. The fabricated molds were used for high-precision glass lens molding experiments, and the interfacial phenomena between the glass component and the mold were clarified and the molded glass components were evaluated. It was demonstrated that the proposed methods for mold fabrication and surface processing was effective for micro lens array manufacturing.

Free Research Field

生産加工学

Academic Significance and Societal Importance of the Research Achievements

本研究によって，ガラスを基板とするマイクロレンズアレイの高精度プレス成形が可能とり，ガラス光学素子の量産の可能性が示された．この研究成果は多岐にわたるガラス製品へ適用可能であり，ものづくり産業への波及効果が大きい．特に近年のスマートフォンやVR，AR，車載ヘッドアップディスプレイ，光通信装置，医療デバイスなどの光学系で需要が増加しているマイクロレンズアレイの製造技術に大きく寄与すると考えられる．また，本研究によってガラス・金型の界面で発生する機械的，物理的，化学的現象を実験的および解析的手法により解明し，金型および離型膜の設計や成形プロセスの最適化などにも貢献すると考えられる．