2022 Fiscal Year Research-status Report
半導体微小機械共振器中のモード間結合効果の解明と超高感度テラヘルツ波検出への応用
| Project/Area Number |
21K04151
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| Research Institution | Tokyo University of Agriculture and Technology |
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Principal Investigator |
張 亜 東京農工大学, 工学(系)研究科(研究院), 准教授 (80779637)
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| Project Period (FY) |
2021-04-01 – 2024-03-31
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| Keywords | MEMS resonantor / nonlinearity / internal mode coupling / MEMS sensor / terahertz sensor / nonlinear dynamics |
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| Outline of Annual Research Achievements |
The objective of this study is to clarify the mode coupling effect in MEMS beam resonators and explore its possible application in high sensitivity terahertz sensing. In the research of this year, we continued investigating the physical origin of the mode coupling effect by measuring the thermally modulated mode coupling strength.
The mode coupling strength is determined by the resonance frequency shift when the coupled high frequency mode is excited simultaneously with the lower mode. As an input heat is applied to the MEMS beam, the MEMS beam is heated up to the buckling condition, which changes the mode coupling strength, as well as the mechanical nonlinearity of the MEMS beam. We have found that the mode coupling strength change has a very similar trend with the mechanical nonlinearity, indicating that these two effects may have the same origin. In addition, we have demonstrated that the mechanical nonlinearity mainly comes from the extended beam length during the mechanical oscillation, and can be controlled by the internal strain in the beam. This has been verified by inputting heat or introducing lattice mismatch in the MEMS beam. These results are very useful for understanding the fundamental physics in MEMS beam resonators, and hence are useful for designing highly sensitive MEMS detectors.
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| Current Status of Research Progress |
Current Status of Research Progress
2: Research has progressed on the whole more than it was originally planned.
Reason
This research goes very smoothly up to now. We have been very closed to fully clarify the mode coupling effect, and understand the relation between mode coupling effect and nonlinearity in MEMS beam resonators, by performing both experimental and theoretical research. In addition, the method we developed for tunning the mechanical nonlinearity of MEMS resonator has been published on high quality journal, indicating that our theoretical model and experimental result are convincing. These results forms a solid fundamental for design highly sensitive terahertz sensor with the mode coupling effect in MEMS resonators.
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| Strategy for Future Research Activity |
The research plan for this year is as follows.
1. We will first complete the modeling of the mode coupling effect, and compare the theoretical and experimental results, to provide a clear explanation to the mode coupling effect.
2. We will perform thermal sensing measurement by using the mode coupling effect to verify the improved thermal sensitivity.
3. We will actively attend international conference and publish the achievements on high-quality journals.
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| Causes of Carryover |
Owing to the COVID-19, it was difficult to attend the planed international conference. Therefore, the planed international travel expense has not used.
The remain amount will be used for purchasing necessary consumers, and also optical components to speedup the optical detections by using MEMS resonators.
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