Preparation of High-Performance Electrochemical Electrodes with Nano-crystalline Diamond Films Formed on Metal Substrates

2023 Fiscal Year Final Research Report

• Project/Area Number: 21K04164
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 21050:Electric and electronic materials-related
• Research Institution: Ariake National College of Technology
• Principal Investigator: Hara Takeshi 有明工業高等専門学校, 創造工学科, 教授 (20413867)
• Project Period (FY): 2021-04-01 – 2024-03-31
• Keywords: ナノ微結晶ダイヤモンド膜 / 電気化学電極 / 金属基板 / 同軸型アークプラズマ蒸着法

Outline of Final Research Achievements

In this study, nanocrystalline diamond (NCD) films formed on metal substrates were studied for application to high-performance electrochemical electrodes. In the first year, we investigated the substance detection performance of NCD films formed on Si substrates as a comparison symmetry when the films could be formed on metal substrates. In parallel, the construction of an electrochemical sensor system was initiated. Micro electron diffraction (MED) of the deposited films showed a pattern attributed to very weak diamond-111, however it was found that another method needs to be explored for structural evaluation. Until the final year of our research, we focused on the surface condition of the metal substrate and started the formation of the films on the metal substrate. Carbon films with excellent fundamental electrochemical properties could be formed on tungsten (W) substrates using a deleterious non-toxic surface treatment agent.

Free Research Field

電子材料薄膜

Academic Significance and Societal Importance of the Research Achievements

本研究では、基板への熱付与を行わず、かつ反応ガスを使用せずにナノ微結晶ダイヤモンド膜の形成を試みている。主流の作製法である化学気相成長法からすると異例ともいえるが、本課題では、環境・人体に優しい基板表面処理法を提案し、金属材料であるタングステン基板上で膜を形成できており、更に作製法としての優位性を高めた。膜構造の本格的な評価は今後の課題だが、電気基礎特性評価では、高性能電気化学センサ用電極として期待されているダイヤモンドやダイヤモンドライクカーボンに似た特性を有していた。これらの材料は硬質皮膜材や電子デバイス材としても期待されており、本研究で形成した膜は、広い分野での活躍が期待できる。