Formation of thin-film multilayer vertical thermoelectric devices and analysis of potential distribution by scanning probe microscopy

2023 Fiscal Year Final Research Report

• Project/Area Number: 21K04629
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 26010:Metallic material properties-related
• Research Institution: Kyushu University
• Principal Investigator: Arita Makoto 九州大学, 工学研究院, 准教授 (30284540)
• Co-Investigator(Kenkyū-buntansha): 宗藤 伸治 九州大学, 工学研究院, 教授 (20380587)
• Project Period (FY): 2021-04-01 – 2024-03-31
• Keywords: 熱電発電 / 薄膜 / 半導体

Outline of Final Research Achievements

In this study, experiments were conducted to investigate and verify the characteristics of a prototype thin-film stacked vertical thermoelectric generation device to improve the volume density of thermoelectric power generation modules. First, thin-film p/n junction structures consisting of p-Si/n-Si were manufactured and its thermoelectric power generation characteristics were investigated. Then, a prototype module with a two-layer p/n structure stacked via an insulating layer was fabricated, and the effectiveness of the stacked structure in improving electromotive force was confirmed.

Free Research Field

薄膜工学

Academic Significance and Societal Importance of the Research Achievements

本研究では、熱電発電モジュールの体積密度の大幅な向上の可能性を持つ薄膜積層型垂直熱電発電デバイスを試作し、熱電材料の薄膜化と熱勾配に垂直方向への電力の取り出しと積層化による電圧の向上を確認した。また、薄膜構造における電位分布の可視化を試み、発電特性との関係を調査した。この研究により得られた知見は、熱電発電モジュールの体積圧縮の新しい手法の手がかりとなり、昨今のエネルギー問題を解決するブレークスルーとして社会に貢献できると考えられる。