次世代高精度ミラー製作のための法線ベクトル追跡型高速ナノ精度形状測定法の開発

2014 Fiscal Year Research Progress Assessment (Verification Result)

• Project/Area Number: 22226005
• Research Category: Grant-in-Aid for Scientific Research (S)
• Allocation Type: Single-year Grants
• Research Field: Production engineering/Processing studies
• Research Institution: Osaka University
• Principal Investigator: ENDO Katsuyoshi 大阪大学, 工学(系)研究科(研究院), 教授 (90152008)
• Co-Investigator(Kenkyū-buntansha): UCHIKOSHI Jyunichi 大阪大学, 工学研究科, 招聘教員 (90273581)
• Project Period (FY): 2010-05-31 – 2014-03-31

Assessment Rating

Verification Result (Rating)

B