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2010 Fiscal Year Annual Research Report

超低消費電力光配線のための集積フォトニクスの進化

Research Project

Project/Area Number 22226008
Research Category

Grant-in-Aid for Scientific Research (S)

Research InstitutionTokyo Institute of Technology

Principal Investigator

小山 二三夫  東京工業大学, 精密工学研究所, 教授 (30178397)

Co-Investigator(Kenkyū-buntansha) 坂口 孝浩  東京工業大学, 精密工学研究所, 助教 (70215622)
松谷 晁宏  東京工業大学, 技術部, 技術専門員 (40397047)
Keywords光デバイス / 光回路 / 半導体レーザ / 光インターコネクト
Research Abstract

本研究では,研究代表者の提案したMEMS構造集積化による絶対波長安定化(アサーマル)面発光レーザアレイ,光群速度低下させて素子サイズを大幅に小型化して高速化を図るスローライト光検出器/光変調器をキイデバイスとして,その並列アレイ化,多波長集積化,超高速化,低消費電力化を進めて,現状技術の100倍から1000倍の超大容量(100Gbps-1Tbps)の光リンク/光配線のための革新的な集積光デバイスの開発を行い,高速化と低消費電力化を両立する集積フォトニクスの進化を目指し,以下の研究成果を得た.
850nm帯面発光レーザにMEMS構造を集積し,従来の半導体レーザの10倍以上の巨大波長温度係数を実現し,広い波長可変範囲の波長掃引レーザの可能性を示した.また,スローライト伝搬を利用した小型光スイッチを提案・試作し,構造分散による巨大な等価屈折率変化を実現して,交差角30s,大きさ30μm角の小型光スイッチの動作に初めて成功した.さらに,面発光レーザにスローライト導波路を直接結合する新しい集積手法を提案し,面発光レーザに光変調器,光増幅器を集積した光機能素子の実現に成功した,長さ50μm以下の小型集積化を可能としたもので,高密度集積化・高速動作・高出力応用を可能にする新しい進展が得られた.一方、共同研究機関であるカリフォルニア大学バークレイ校と連携して,サブ波長構造回折格子を用いた新しいモード合分波器素子の提案や動作実証などの新たな知見を得た.

  • Research Products

    (26 results)

All 2011 2010

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (23 results)

  • [Journal Article] Spatial Mode Multiplexer/Demultiplexer Based on Tapered Hollow Waveguide2011

    • Author(s)
      Hamed Dalir, Fumio Koyama
    • Journal Title

      IEICE Electronics Express

      Volume: vol.8, no.9 Pages: 629-635

    • Peer Reviewed
  • [Journal Article] A Review on Polarization Control of Vertical-Cavity Surface-Emitting Semiconductor Lasers2011

    • Author(s)
      P.Babu Dayal^*, Fumio Koyama
    • Journal Title

      Recent Patents on Electrical Engineering

      Volume: vol.4, no.2(in press)

    • Peer Reviewed
  • [Journal Article] Reactive Ion Etching of Si Using Ar/F_2 Plasma2010

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Jpn.J.App.Phys.

      Volume: vol.49, no.6 Pages: GH05(3)

    • Peer Reviewed
  • [Presentation] Reflection-type Slow Light Optical Switches Using Current Injection2011

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Organizer
      CLEO2011
    • Place of Presentation
      U.S.A, Baltimore
    • Year and Date
      2011-05-03
  • [Presentation] Wavelength Tuning and Athermal Operations of Micro-machined VCSELs for Uncooled WDM2011

    • Author(s)
      Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani, Fumio Koyama
    • Organizer
      CLEO2011
    • Place of Presentation
      U.S.A, Baltimore
    • Year and Date
      2011-05-02
  • [Presentation] Athermal Hollow Waveguide Distributed BraggReflector Laser2011

    • Author(s)
      Hideaki Yamakawa, Naomi Tadokoro, TakahiroSakaguchi, Yoshihisa Tokunaga, Fumio Koyama
    • Organizer
      CLEO2011
    • Place of Presentation
      U.S.A, Baltimore
    • Year and Date
      2011-05-02
  • [Presentation] Giant Wavelength-Temperature Dependence of VCSEL with Thermally Actuated Cantilever Structure2011

    • Author(s)
      Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani Fumio Koyama
    • Organizer
      CLEO2011
    • Place of Presentation
      U.S.A, Baltimore
    • Year and Date
      2011-05-02
  • [Presentation] Dry Etching of Si by Solid Source I_2 Inductively Coupled Plasma2010

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      MNC2010
    • Place of Presentation
      Japan, Fukuoka
    • Year and Date
      2010-11-11
  • [Presentation] Lateral Integration of VCSEL with Slow Light Amplifier/Modulator2010

    • Author(s)
      Toshikazu Shimada, Fumio Koyama
    • Organizer
      IEEE Photonics Society Annual Meet. 2010
    • Place of Presentation
      U.S.A, Denver
    • Year and Date
      2010-11-08
  • [Presentation] Advances of VCSEL Photonics for Optical Interconnects2010

    • Author(s)
      ^*Fumio Koyama
    • Organizer
      ICSICT2010
    • Place of Presentation
      China, Shanghai
    • Year and Date
      2010-11-04
  • [Presentation] Vertical Interconnections for Stacked Photonic Integrated Circuits with Multimode Interference Hollow Waveguide2010

    • Author(s)
      Ken Kirita, Takahiro Sakaguchi, Fumio Koyama
    • Organizer
      MOC2010
    • Place of Presentation
      Taiwan, Hsinchu
    • Year and Date
      2010-11-03
  • [Presentation] Large signal Modulation analysis of lateral-optical-feedback VCSELs2010

    • Author(s)
      Hamed Dalir, Fumio Koyama
    • Organizer
      MOC2010
    • Place of Presentation
      Taiwan, Hsinchu
    • Year and Date
      2010-11-02
  • [Presentation] Grating Trimming of VCSEL with High Contrast sub-wavelength Grating2010

    • Author(s)
      Xiaodong Gu, Akihiro Imamura, Fumio Koyama
    • Organizer
      MOC2010
    • Place of Presentation
      Taiwan, Hsinchu
    • Year and Date
      2010-11-02
  • [Presentation] Characterizations of Reflection-type Slow Light Optical Switches2010

    • Author(s)
      Ayumi Fuchida, Takeru Sakairi, Akihiro Matsutani, Fumio Koyama
    • Organizer
      MOC2010
    • Place of Presentation
      Taiwan, Hsinchu
    • Year and Date
      2010-11-02
  • [Presentation] Athermal Semiconductor Lasers based on VCSEL Technology2010

    • Author(s)
      Fumio Koyama
    • Organizer
      MOC2010
    • Place of Presentation
      Taiwan, Hsinchu
    • Year and Date
      2010-11-01
  • [Presentation] Multi-wavelength 1060nm-band VCSEL Array with Tapered Hollow Waveguide Multiplexer2010

    • Author(s)
      Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
    • Organizer
      International Semiconductor Laser Conf.
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2010-09-29
  • [Presentation] Modulation bandwidth enhancement of VCSELs with lateral optical feedback of slow light2010

    • Author(s)
      Hamed Dalir, Fumio Koyama
    • Organizer
      International Semiconductor Laser Conf.
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2010-09-27
  • [Presentation] Controlled temperature dependence of lasing wavelength of VCSELs with a thermally actuated cantilever2010

    • Author(s)
      Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Organizer
      International Semiconductor Laser Conf.
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2010-09-27
  • [Presentation] Tapered hollow waveguide multiplexer for multi-wavelegth VCSEL array2010

    • Author(s)
      Akihiko Imanura, Akihiro Matsutani, Fumio Koyama
    • Organizer
      iNOW 2010
    • Place of Presentation
      China, Beijing and Changchun
    • Year and Date
      2010-08-03
  • [Presentation] Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure2010

    • Author(s)
      Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Organizer
      iNOW 2010
    • Place of Presentation
      China, Beijing and Changchun
    • Year and Date
      2010-08-03
  • [Presentation] VCSEL-based Slow Light Phtotonics2010

    • Author(s)
      Fumio Koyama
    • Organizer
      iNOW 2010
    • Place of Presentation
      China, Beijing and Changchun
    • Year and Date
      2010-08-01
  • [Presentation] Compact Reflection-type Optical Switch with Slowing Light2010

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Organizer
      OECC2010
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2010-07-10
  • [Presentation] Wavelength Engineering of VCSELs2010

    • Author(s)
      Fumio Koyama
    • Organizer
      OECC2010
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2010-07-06
  • [Presentation] Advances of VCSEL Photonics2010

    • Author(s)
      Fumio Koyama
    • Organizer
      Laser Optics 2010
    • Place of Presentation
      Russia, St.Petersburg
    • Year and Date
      2010-07-01
  • [Presentation] Wavelength Trimming of MEMS VCSELs for Post-process Wavelength Allocation2010

    • Author(s)
      Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Organizer
      22nd IPRM
    • Place of Presentation
      Japan, Kanazawa
    • Year and Date
      2010-06-02
  • [Presentation] Proposal of Multi-Wavelength Integration of Athermal GAASVCSEL Array with Thermally Actuated Cantilever Structure2010

    • Author(s)
      Norihiko Nakata, Hayato Sano, Akihiro Matsutani, Fumio Koyama
    • Organizer
      22nd IPRM
    • Place of Presentation
      Japan, Kanazawa
    • Year and Date
      2010-06-02

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Published: 2012-07-19  

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