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2011 Fiscal Year Annual Research Report

超低消費電力光配線のための集積フォトニクスの進化

Research Project

Project/Area Number 22226008
Research InstitutionTokyo Institute of Technology

Principal Investigator

小山 二三夫  東京工業大学, 精密工学研究所, 教授 (30178397)

Co-Investigator(Kenkyū-buntansha) 坂口 孝浩  東京工業大学, 精密工学研究所, 助教 (70215622)
松谷 晃宏  東京工業大学, 技術部, 技術専門員 (40397047)
Keywords光デバイス / 光回路 / 半導体レーザ / 光インターコネクト / 面発光レーザ
Research Abstract

本研究では,研究代表者の提案したMEMS構造集積化による絶対波長安定化(アサーマル)面発光レーザアレイ,光群速度低下させて素子サイズを大幅に小型化して高速化を図るスローライト光検出器/光変調器をキイデバイスとして,その並列アレイ化,多波長集積化,超高速化,低消費電力化を進めて,現状技術の100倍から1000倍の超大容量(100Gbps-1Tbps)の光リンク/光配線のための革新的な集積光デバイスの開発を行い,高速化と低消費電力化を両立する集積フォトニクスの進化を目指し,平成23年度は,以下の研究成果を得た.
多波長面発光レーザとテーパ中空導波路合波器を用いた合波デバイスを実現し,素子長200μmの微小回路で,12チャネルの多波長合波の可能性を実証した.また,MEMS構造を集積することで波長が温度に依存しないアサーマル面発光レーザを製作し,通常の半導体レーザの約1/40の小さな波長温度係数を実現するとともに,局所加熱による1.1nmの連続波長掃引を達成し,温度制御不要の多波長集積化光源の可能性を示した.さらに,スローライト伝搬を利用した小型光スイッチを試作し,構造分解散による巨大な等価屈折率変化を実現して,大きさ30μm角の小型光スイッチの動特性から,キャリア注入によるナノ秒オーダの高速スイッチングが可能であることを実証した.さらには,新しい機能デバイスとして,大きな構造分散を用いたビーム掃引・空間スイッチング素子を提案・試作し,解像点数200を越える高解像度スイッチング素子の動作に成功した.

Current Status of Research Progress
Current Status of Research Progress

2: Research has progressed on the whole more than it was originally planned.

Reason

MEMS集積による面発光レーザの絶対波長安定化とともに,熱光学効果を用いた連続波長掃引技術の両立を達成するとともに,12波長規模の小型合波器との集積化も実現し,23年度の当初目的をほぼ達成したと考えている.さらには,面発光レーザとスローライト光変調器・増幅器の横方向集積を初めて実現するとともに,スローライト増幅器を用いた世界最高レベルの高解像度光ビーム掃引技術を実現するなどの進捗が得られた.

Strategy for Future Research Activity

平成23年度までに得られた研究成果を基に,以下の研究を推進する.
1)絶対波長制御技術の確立:マイクロマシンを用いた面発光レーザによる波長制御技術を用いて,さらにその高精度化,波長掃引機能の付加を進める.2)面発光レーザレーザへの機能集積とスローライトフォトニクス:面発光レーザとの新しい結合方法をさらに追究し,スローライトフォトニクスによる高速光変調器集積光源のSub-Voltの低電圧化,高速化,低消費電力化を進め,低消費電力化と高速化の限界を探る.3)高解像度光ビーム掃引と光スイッチングベの展開:スローライト伝搬を用いた光スイッチの小型・集積化,新しい高解像度ビーム偏向技術など,新機能の創出を具現化し,新しい光スイッチングデバイスとその集積化の展開を図る.

  • Research Products

    (48 results)

All 2012 2011

All Journal Article (20 results) (of which Peer Reviewed: 20 results) Presentation (28 results)

  • [Journal Article] Electro-Thermal Beam Steering Using Bragg Reflector Waveguide Amplifier2012

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: vol.51 Pages: 020206-1-3

    • Peer Reviewed
  • [Journal Article] Wavelength Trimming of Micro-Machined VCSELs2012

    • Author(s)
      Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      IEICE Trans.Electron.

      Volume: vol.E95-C Pages: 237-242

    • Peer Reviewed
  • [Journal Article] Electro-thermal Tuning of MEMS VCSEL with Giant Wavelength-temperature Dependence2012

    • Author(s)
      Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Electronics Express

      Volume: Vol.9, no.5 Pages: 416-421

    • Peer Reviewed
  • [Journal Article] Lateral Integration of MEMS VCSEL and Slow Light Amplifier Boosting Single Mode Power2012

    • Author(s)
      Masanori Nakahama, Toshikazu Shitnada, Fumio Koyama
    • Journal Title

      Electronics Express

      Volume: Vol.9, no.6 Pages: 544-551

    • Peer Reviewed
  • [Journal Article] Giant Wavelength-temperature Dependence of a Micro-machined VCSEL with a Thermally Actuated Cantilever Structure2012

    • Author(s)
      Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Jpn.J.Applied Physics

      Volume: Vol.51, no.4 Pages: 040209-1-3

    • Peer Reviewed
  • [Journal Article] Ultra-compact Beam Steering Device based on Bragg Reflector Waveguide Amplifier with Number of Resolution Points over 1002012

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
    • Journal Title

      Electron.Lett.

      Volume: Vol.48, no.6 Pages: 336-337

    • Peer Reviewed
  • [Journal Article] On-Chip High-Resolution Beam Scanner Based on Bragg Reflector Slow-Light Waveguide Amplifier and Tunable MEMS VCSEL2012

    • Author(s)
      Masanori Nakahama, Xiaodong Gu, Toshikazu Shimada, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: Vol.51,no.4 Pages: 040208-1-3

    • Peer Reviewed
  • [Journal Article] Fabrication and Characterization of Bragg Reflector Slow Light Waveguide with Oxide Lateral Confinement2012

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: Vol.51, no.4 Pages: 50203-1-3

    • Peer Reviewed
  • [Journal Article] Giant wavelength-temperature dependence of a micro-machined VCSEL with a thermally actuated cantilever structure2012

    • Author(s)
      Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: Vol.51, no.4 Pages: 040209-1-3

    • Peer Reviewed
  • [Journal Article] Lateral Integration of MEMS VCSEL and Slow Light Amplifier Boosting Single Mode Power2012

    • Author(s)
      Masanori Nakahama, Toshikazu Shimada, Fumio Koyama
    • Journal Title

      IEICE Electronics Express

      Volume: Vol.9, no.6 Pages: 544-551

    • Peer Reviewed
  • [Journal Article] スローライトを利用した全反射光スイッチ2012

    • Author(s)
      淵田歩, 松谷晃宏, 小山二三夫
    • Journal Title

      電子情報通信学会論文誌C

      Volume: J95-C, No.4 Pages: 75-83

    • Peer Reviewed
  • [Journal Article] Spatial Mode Mulriplexer/Demultiplexer Based on Tapered Hollow Waveguide2011

    • Author(s)
      Hamed Dalir, Yasushi Yokota, Fumio Koyama
    • Journal Title

      ICE Electronics Express

      Volume: vol.8, no.9 Pages: 684-688

    • Peer Reviewed
  • [Journal Article] A Review on Polarization Control of Vertical-Cavity Surface-Emitting Semiconductor Lasers2011

    • Author(s)
      Babu Dayal, Fumio Koyama
    • Journal Title

      Recent Patents on Electrical Engineering

      Volume: vol.4, no.2 Pages: 81-97

    • Peer Reviewed
  • [Journal Article] Inductively Coupled Plasma Etching of Silicon Using Solid Iodine as an Etching Gas Source2011

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: vol.50 Pages: 06GG07-1-4

    • Peer Reviewed
  • [Journal Article] Slow-light total-intemal-reflection switch with bending angle of 30 deg2011

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Optics Letters

      Volume: vol.36, no.14. Pages: 2644-2646

    • Peer Reviewed
  • [Journal Article] Bandwidth enhancement of single-mode VCSEL with lateral optical feedback of slow light2011

    • Author(s)
      Hamed Dalir, Fumio Koyama
    • Journal Title

      IEICE Electronics Express

      Volume: vol.8, no.13 Pages: 1075-1081

    • Peer Reviewed
  • [Journal Article] Multiplexing of Multi-Wavelength 1060-nm-Band GalnAs/GaAs Vertical Cavity Surface Emitting Laser Array Using Tapered Hollow Waveguide2011

    • Author(s)
      Akihiro Imamura, Akihiro Matsutani, Fumio Koyatna
    • Journal Title

      Applied Physics Express

      Volume: vol.4 Pages: 082106-1-3

    • Peer Reviewed
  • [Journal Article] Wavelength Trimming of Vertical-Cavity Surface-Emitting Lasers with High-Contrast Subwavelength Grating2011

    • Author(s)
      Xiaodong Gu, Akihiro Imamura, Futnio Koyama
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: vol.50 Pages: 100207-1-3

    • Peer Reviewed
  • [Journal Article] Giant and High-resolution Beam Steering Using Slow-light Waveguide Amplifier2011

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Fumio Koyama
    • Journal Title

      Optics Express

      Volume: vol.19, no.23 Pages: 22675-22683

    • Peer Reviewed
  • [Journal Article] Beam Steering in GalnAs/GaAs Slow-light Bragg Reflector Waveguide Amplifier2011

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
    • Journal Title

      Appl.Phys.Lett.

      Volume: vol.99, no.21 Pages: 211107-1-3

    • Peer Reviewed
  • [Presentation] Switching Characteristics of 30μm×30μm Compact Optical Switch with Slowing Light2012

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Organizer
      OFC/NFOEC2012
    • Place of Presentation
      Los Angeles, USA
    • Year and Date
      2012-03-07
  • [Presentation] High Contrast Grating for Spatial Mode Filtering and Mode Control of VCSELs2012

    • Author(s)
      Fumio Koyama
    • Organizer
      Photonics West 2012,SPIE
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2012-01-22
  • [Presentation] Transverse Mode Control of VCSELs Using Highly Angular Dependent High Contrast Sub-wavelength Grating2011

    • Author(s)
      Jyunichi Kashino, Akihiro Imamura, Fumio Koyama
    • Organizer
      17th Microoptics Conference, MOC'11
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2011-11-01
  • [Presentation] Slow Light Amplifier with Highly Angular Dependent HCG Mirror2011

    • Author(s)
      Yasumitsu Miyake, Ayumi Fuchida, Fumio Koyama
    • Organizer
      17th Microoptics Conference, MOC'11
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2011-11-01
  • [Presentation] Advances of VCSEL Photonics2011

    • Author(s)
      Fumio Koyama
    • Organizer
      17th Microoptics Conference, MOC'11
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2011-10-31
  • [Presentation] Experimental Demonstration of Beam-Steering Based on Slow-Light Waveguide Amplifier2011

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
    • Organizer
      17th Microoptics Conference, MOC'11
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2011-10-31
  • [Presentation] Lateral Integration of MEMS VCSEL and Slow Light Amplifier2011

    • Author(s)
      Masanori Nakahama, Toshikazu Shimada, Fumio Koyama
    • Organizer
      17th Microoptics Conference, MOC'11
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2011-10-31
  • [Presentation] Slow Light Amplifier Laterally Integrated with VCSEL2011

    • Author(s)
      Toshikazu Shimada, Fumio Koyama
    • Organizer
      17th Microoptics Conference, MOC'11
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2011-10-31
  • [Presentation] Si based High-index-contrast-grating Structure fabricated by High Temperature Cl_2 Inductively Coupled Plasma Etching using Thermal Nanoimprint Resist Mask2011

    • Author(s)
      Akihiro Matsutani, Yuuki Hashidume, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      24th International Microprocesses and Nanotechnology Conference, MNC2011
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-10-26
  • [Presentation] Giant Wavelength-temperature Dependence and Electro-thermal Tuning of MEMSVCSEL2011

    • Author(s)
      Masanori Nakahama, Norihiko Nakata, Hayato Sano, Akihiro Matsutani, Fumio Koyama
    • Organizer
      EEE PHOTONICS 2011, IPC2011
    • Place of Presentation
      Arlington, USA
    • Year and Date
      2011-10-13
  • [Presentation] Miniature Slow Light Total-Intemal-Reflection Switch with Carrier Injection2011

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Organizer
      EEE PHOTONICS 2011, IPC2011
    • Place of Presentation
      Arlington, USA
    • Year and Date
      2011-10-10
  • [Presentation] Lateral Integration of VCSEL and Slow Light Modulator2011

    • Author(s)
      Toshikazu Shimada, Ayumi Fuchida, Fumio Koyama
    • Organizer
      37TH EUROPEAN CONFERENCE AND EXHIBITION ON OPTICAL COMMUNICATION, ECOC2011
    • Place of Presentation
      Geneve, Swiss
    • Year and Date
      2011-09-21
  • [Presentation] Giant and High-resolution Beam-Steering from Slow Light Amplifier with Bragg Reflector Waveguide2011

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Fumio Koyama
    • Organizer
      IQEC/CLEO Pacific Rim 2011
    • Place of Presentation
      Sydney, Australia
    • Year and Date
      2011-08-30
  • [Presentation] New Functions and Integration of VCSEL-based Slow Light Devices2011

    • Author(s)
      Fumio Koyama
    • Organizer
      International Nano-Optoelectronics Workshop, iNOW2011
    • Place of Presentation
      St.Petersburg and Wurzburg, Russia and Germany
    • Year and Date
      2011-07-24
  • [Presentation] Athermal Operations and Giant Temperature Dependence of Micromachined VCSELs2011

    • Author(s)
      Hayato Sano, Nakata Norihiko, Masanori Nakahama, Akihiro Matsutani, Fumio Koyama
    • Organizer
      International Nano-Optoelectronics Workshop, iNOW2011
    • Place of Presentation
      St.Petersburg and Wurzburg, Russia and Germany
    • Year and Date
      2011-07-24
  • [Presentation] Lateral Integration of VCSEL with Slow Light Modulator2011

    • Author(s)
      Toshikazu Shimada, Fumio Koyama
    • Organizer
      International Nano-Optoelectronics Workshop, iNOW2011
    • Place of Presentation
      St.Petersburg and Wurzburg, Russia and Germany
    • Year and Date
      2011-07-24
  • [Presentation] Enhanced modulation bandwidth of VCSELs with lateral optical feedback beyond the frequency of relaxation oscillations2011

    • Author(s)
      Hamed Dalir, Fumio Koyama
    • Organizer
      International Nano-Optoelectronics Workshop, iNOW2011
    • Place of Presentation
      St.Petersburg and Wurzburg, Russia and Germany
    • Year and Date
      2011-07-24
  • [Presentation] Recent Advances in VCSEL Photonics2011

    • Author(s)
      Fumio Koyama
    • Organizer
      The 16th Opto-Electronics and Communications Conference, OECC2011
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2011-07-07
  • [Presentation] Spatial Mode Multiplexer/Demultiplexer Based on Tapered Hollow Waveguide2011

    • Author(s)
      Hamed Dalir, Yasushi Yokota, Fumio Koyama
    • Organizer
      The 16th Opto-Electronics and Communications Conferenee, OECC2011
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2011-07-07
  • [Presentation] Lateral Integration of VCSEL and Slow Light Amplifier2011

    • Author(s)
      Toshikazu Shimada, Fumio Koyama
    • Organizer
      The 16th Opto-Electronics and Communications Conference, OECC2011
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2011-07-06
  • [Presentation] Proposal of Beam Steering on Slow-light Waveguide Amplifier2011

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Fumio Koyama
    • Organizer
      The 16th Opto-Electronics and Communications Conferenee, OECC2011
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2011-07-06
  • [Presentation] Spatial Mode Demultiplexer Based on High Contrast Sub-Wavelength Grating Hollow Waveguide2011

    • Author(s)
      Akihiro Imamura, Weijian Yang, James Ferrara, Yuuki Hasidume, Xiaodong Gu, Fumio Koyama, Connie J.Chang-Hasnain
    • Organizer
      The 16th Opto-Electronics and Communications Conferenee, OECC2011
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      2011-07-06
  • [Presentation] Reflection-type Slow Light Optical Switches Using Current Injection2011

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Organizer
      Conference on Lasers and Electro-Optics, CLEO2011
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2011-05-03
  • [Presentation] Wavelength Tuning and Athermal Operations of Micro-machined VCSELs for Uncooled WDM2011

    • Author(s)
      Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani, Fumio Koyama
    • Organizer
      Conference on Lasers and Electro-Optics, CLEO2011
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2011-05-02
  • [Presentation] Athermal Hollow Waveguide Distributed Bragg Reflector Laser2011

    • Author(s)
      Hideaki Yamakawa, Naomi Tadokoro, Takahiro Sakaguchi, Yoshihisa Tokunaga, Fumio Koyama
    • Organizer
      Conference on Lasers and Electro-Optics, CLEO2011
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2011-05-02
  • [Presentation] Giant Wavelength-Temperature Dependence of VCSEL with Thermally Actuated Cantilever Structure2011

    • Author(s)
      Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Organizer
      Conference on Lasers and Electro-Optics, CLEO2011
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2011-05-02
  • [Presentation] Fabrication and Characterization of Si/SiO2 High Contrast Grating using Nanoimprint Lithography2011

    • Author(s)
      Yuuki Hashizume, Yasumitsu Miyake, Akihiro Matsutani, Hideo Obtsuki, Fumio Koyama
    • Organizer
      Photonics West 2012, SPIE
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2011-01-22
  • [Presentation] VCSEL-based Slow Light Photonics : Switching, Modulation, Amplification, and Beam Steering2011

    • Author(s)
      Fumio Koyama
    • Organizer
      Photonics West 2012, SPIE
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2011-01-22

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Published: 2013-06-26  

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