A MEMS cantilever for stimulus response measurements of single cells

2013 Fiscal Year Final Research Report

• Project/Area Number: 22241033
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Microdevices/Nanodevices
• Research Institution: The University of Tokyo
• Principal Investigator: SHIMOYAMA Isao 東京大学, 情報理工学(系)研究科, 教授 (60154332)
• Co-Investigator(Renkei-kenkyūsha): MATSUMOTO Kiyoshi 東京大学, IRT 研究機構, 特任教授 (10282675) ; KAN Tetsuo 東京大学, 大学院情報理工学系研究科, 助教 (30504815) ; TAKEI Yusuke 東京大学, 大学院情報理工学系研究科, 特任助教 (00513011) ; NODA Kentaro 東京大学, 大学院情報理工学系研究科, 特任助教 (00547482) ; TAKAHASHI Hidetoshi 東京大学, IRT 研究機構, 特任研究員 (90625485)
• Project Period (FY): 2010-04-01 – 2014-03-31
• Keywords: マイクロセンサー

Research Abstract

In this project, a triaxial MEMS force sensing cantilever was studied. The sensor is equipped with a piezoresistor for force sensing at the root of the cantilever so that a quantitative mechanical stimuli could be applied to biological cells. The MEMS cantilever was made from an SOI wafer. A piezoresistive layer was formed by thermal diffusion on the surface of either cantilever root or the sidewall of the beam structure so that the corresponding three dimensional forces can be detected simultaneously. The resolution of the measurable force was as small as 1 uN for all the three directional forces, and the triaxial force could be independently measured with the device.

Research Products

• [Journal Article] Differential pressure distribution measurement for the development of insect-sized wings (2013)
  • Author(s): Hidetoshi Takahashi, Kiyoshi Matsumoto and Isao Shimoyama
  • Journal Title: Measurement Science and Technology Volume: vol.24, no.5, (article no.055304)
  • DOI: 10.1088/0957-0233/24/5/055304
  • Peer Reviewed
• [Journal Article] A photoresponse -compensated parallel piezoresistive cantilever for cellular force measurements (2013)
  • Author(s): Uijin G. Jung, Kenta Kuwana, Yoshiharu Ajiki, Hidetoshi Takahashi, Tetsuo Kan, Yusuke Takei, Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto and Isao Shimoyama
  • Journal Title: Journal of Micromechanics and Microengineering Volume: vol.23, no.5, (article no.045015)
  • DOI: 10.1088/0960-1317/23/4/045015
  • Peer Reviewed
• [Journal Article] Design of a piezoresistive triaxial force sensor probe using the sidewall doping method (2013)
  • Author(s): Tetsuo Kan, Hidetoshi Takahashi, Nguyen Binh-Khiem, Yuichiro Aoyama, Yusuke Takei, Kentaro Noda, Kiyoshi Matsumoto and Isao Shimoyama
  • Journal Title: Journal of Micromechanics and Microengineering Volume: vol.23, no.3, (article no.035027)
  • DOI: 10.1088/0960-1317/23/3/035027
  • Peer Reviewed
• [Presentation] Quantitative evaluation of the influence of dopaminergic neuron on flapping locomotion (2013)
  • Author(s): Koki Azuma, Hidetoshi Takahashi, Tetsuo Kan, Jun Tanimura, Kei Ito, Kiyoshi Matsumoto and Isao Shimoyama
  • Organizer: The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2013)
  • Place of Presentation: Taipei, Taiwan
  • Year and Date: 20130120-24
• [Presentation] A piezoresistive cellular traction force sensor (2013)
  • Author(s): Uijin G. Jung, Hidetoshi Takahashi, Tetsuo Kan, Kiyoshi Matsumoto and Isao Shimoyama
  • Organizer: The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2013)
  • Place of Presentation: Taipei, Taiwan
  • Year and Date: 20130120-24
• [Presentation] 50nm-thick piezo-resistive cantilever (2012)
  • Author(s): Takanori Usami, Akihito Nakai, Kiyoshi Matsumoto and Isao Shimoyama
  • Organizer: The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2012)
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 20120305-08
• [Presentation] Triaxial force sensor with strain concentration notch beam for measurement of insect flight force (2012)
  • Author(s): Koki Azuma, Hidetoshi Takahashi, Tetsuo Kan, Kiyoshi Matsumoto and Isao Shimoyama
  • Organizer: The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2012)
  • Place of Presentation: Paris, France
  • Year and Date: 20120129-0202
• [Presentation] サイドウォールドーピングを用いたピエゾ抵抗型三軸力センサ (2011)
  • Author(s): 菅哲朗 ,高橋英俊 ,青山雄一郎 ,竹井裕介,野田堅太郎 ,松本潔 ,下山勲
  • Organizer: 第28回「センサ・マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 東京
  • Year and Date: 20110926-27
• [Presentation] Si nano-pillars for measuring traction force exerted by filopodia (2011)
  • Author(s): Uijin Jung, Tetsuo Kan, Kenta Kuwana, Kiyoshi Matsumoto and Isao Shimoyama
  • Organizer: The 16th IEEE International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11)
  • Place of Presentation: Beijin, China
  • Year and Date: 20110605-09
• [Presentation] Differential pressure distribution measurement of a free-flying butterfly wing (2011)
  • Author(s): Hidetoshi Takahashi, Kiyoshi Matsumoto and Isao Shimoyama
  • Organizer: The 16th IEEE International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11)
  • Place of Presentation: Beijin, China
  • Year and Date: 20110605-09
• [Presentation] A Gas Sensor Based on Viscosity Change of Ionic Liquid (2011)
  • Author(s): Kazuharu Ohsawa, Hidetoshi Takahashi, Kentaro Noda, Tetsuo Kan, Kiyoshi Matsumoto and Isao Shimoyama
  • Organizer: The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2011)
  • Place of Presentation: Cancun, Mexico
  • Year and Date: 20110123-27
• [Remarks]
  • URL: http://www.leopard.t.u-tokyo.ac.jp/research.html