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2012 Fiscal Year Final Research Report

Development of new high power deep UV light emitting device

Research Project

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Project/Area Number 22246051
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionRitsumeikan University

Principal Investigator

AOYAGI Yoshinobu  立命館大学, 立命館グローバル・イノベーション研究機構, 特別招聘教授 (70087469)

Co-Investigator(Kenkyū-buntansha) TAKEUCHI Misaichi  立命館大学, 立命館グローバル, 准教授 (60284585)
KUROUCHI Masahito  立命館大学, 立命館グローバル・イノベーション研究機構, ポストドクトラルフェロー (10452187)
Research Collaborator KUROSE Noriko  PIリサーチ, 主任研究員
Project Period (FY) 2010 – 2012
Keywords深紫外光 / マイクロプラズマ / AlGaN / MIPE / 深紫外発光素子 / 水浄化 / 医療応用 / 高出力
Research Abstract

A dynamically-controlled micro-plasma-excited (MIPE) aluminum gallium nitride deepultraviolet (DUV) light-emitting device is demonstrated. This device provides high-powerDUV emission at any desired wavelength, and allows enlargement of emission areas likeplasma display panels for easy, low-cost fabrication. Neither p-n junctions nor electrodecontacts are required for device fabrication. We fabricated 2-inch diameter wafer-sizeMIPE emitters of DUV light at specific wavelengths from AlGaN quantum wells with 50 mWaverage output power. We can also fabricate 6-inch diameter DUV emitters using sapphirewafers and 1 m×5 m panel-type DUV emitters.

  • Research Products

    (19 results)

All 2013 2012 2011 2010

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (8 results) Book (1 results) Patent(Industrial Property Rights) (6 results) (of which Overseas: 1 results)

  • [Journal Article]2013

    • Author(s)
      Y. Aoyagi, N. Kurose
    • Journal Title

      Applied PhysicsLetters

      Pages: 041114-1-041114-3.

    • Peer Reviewed
  • [Journal Article]2012

    • Author(s)
      Y. Aoyagi, M. Takeuchi, S. Iwai, H.Hirayama
    • Journal Title

      AIP Advances

      Pages: 0012177-0012183

    • Peer Reviewed
  • [Journal Article]2012

    • Author(s)
      Y. Aoyagi, M. Takeuchi, K. Yoshida, M. Kurouchi, Y. Nanishi, H. Sugano, Y. Ahiko,H. Nakamura
    • Journal Title

      Journal of Environmental Protection

      Volume: 137 Pages: 1215-1218

    • Peer Reviewed
  • [Journal Article]2011

    • Author(s)
      Y. Aoyagi, M. Takeuchi, S. Iwai, H.Hirayama
    • Journal Title

      Appl. Phys. Letters

      Pages: 112110-1-112110

    • Peer Reviewed
  • [Presentation] Large areamicro-plasma exited AlGaN deep ultravioket light emitter2012

    • Author(s)
      N. Kurose, Y. Aoyagi
    • Organizer
      InternationalDisplay Workshop
    • Place of Presentation
      京都国際会議場 (京都府)
    • Year and Date
      2012-12-04
  • [Presentation] Development of newdeep ultra-violet light emitter usingmicro-plasma excitation of AlGaN and itsapplication2012

    • Author(s)
      Y. Aoyagi, N. Kurose
    • Organizer
      International Conference onNanotechnology and MEMS
    • Place of Presentation
      静岡大学 (静岡県)
    • Year and Date
      2012-12-01
  • [Presentation] Development oflarge area micro-plasma-excited AlGaNdeep ultraviolet light device (MIPE) fordisinfection of water2012

    • Author(s)
      N. Kurose, Y. Aoyagi
    • Organizer
      WaterContamination Emergency Conference 5
    • Place of Presentation
      Mulheim an der Ruhr(Germany).
    • Year and Date
      2012-11-19
  • [Presentation] Two inch large areaDUV AlGaN light emitter using micro-plasmaexcitation2012

    • Author(s)
      N. Kurose, Y. Aoyagi
    • Organizer
      Iinternational Workshop on Nitride Semiconductors
    • Place of Presentation
      札幌コンベンションセンター (北海道)
    • Year and Date
      2012-10-16
  • [Presentation] 高出力大面積マイクロプラズマ励起AlGaN深紫外発光素子の開2012

    • Author(s)
      黒瀬範子、青柳克信
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学(愛媛県)
    • Year and Date
      2012-10-11
  • [Presentation] Development of new deep ultra-violet light emitter usingmicro-plasma excitation of AlGaN and itsapplication2012

    • Author(s)
      N. Kurose, Y. Aoyagi
    • Organizer
      International Symposium onGaN related compounds
    • Place of Presentation
      St.Petersburg (Russia)
    • Year and Date
      2012-07-16
  • [Presentation] AlNボイド形成法によるSi基板上へのクラックフリーAlGaN層成長2010

    • Author(s)
      武内道一、林洋平、荒木努、名西やすし、青柳克信
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2010-03-29
  • [Presentation] 深紫外線LEDを用いた水の消毒2010

    • Author(s)
      吉田薫、黒内正仁、安井宣仁、武内道一、荒木努、神子直之、名西やすし、青柳克信
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2010-03-28
  • [Book] 基礎からわかるナノデバイス2011

    • Author(s)
      青柳克信、石橋幸治、高柳英明、中ノ勇人、平山祥郎
    • Total Pages
      125-176
    • Publisher
      コロナ社
  • [Patent(Industrial Property Rights)] オゾン濃度測定装置2011

    • Inventor(s)
      吉田薫、青柳克信
    • Industrial Property Rights Holder
      立命館大学, (有)光電鍍工業所
    • Industrial Property Number
      特許 特願 2011-231347
    • Filing Date
      2011-10-21
  • [Patent(Industrial Property Rights)] AlN層の製造方法およびAlN2011

    • Inventor(s)
      青柳克信 武内道一
    • Industrial Property Rights Holder
      立命館大学
    • Industrial Property Number
      特許 特願 2011-151137
    • Filing Date
      2011-07-07
  • [Patent(Industrial Property Rights)] Crystal growth method and2011

    • Inventor(s)
      青柳克信
    • Industrial Property Rights Holder
      立命館大学,シャープ(株)
    • Industrial Property Number
      特許 公開 US-2012-0007039-Al
    • Filing Date
      2011-03-03
    • Overseas
  • [Patent(Industrial Property Rights)] オゾン濃度測定装置2011

    • Inventor(s)
      吉田薫、青柳克信
    • Industrial Property Rights Holder
      立命館大学, (有)光電鍍工業所
    • Industrial Property Number
      特許 特願 2011-038925
    • Filing Date
      2011-02-24
  • [Patent(Industrial Property Rights)] 窒化物半導体発光素子およ2011

    • Inventor(s)
      太田征孝、青柳克信
    • Industrial Property Rights Holder
      シャープ(株)、立命館大学
    • Industrial Property Number
      特許 特願 2011-004714
    • Filing Date
      2011-01-13
  • [Patent(Industrial Property Rights)] 結晶成長方及び半導体素子2010

    • Inventor(s)
      青柳克信 武内道一
    • Industrial Property Rights Holder
      立命館大学
    • Industrial Property Number
      特許特願 2010-155388
    • Filing Date
      2010-07-08

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Published: 2014-08-29   Modified: 2015-09-15  

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