2012 Fiscal Year Final Research Report
Development of ultra high-sensitive and multi-axis accelerometer and magnetic sensor, and those integration on a ceramic substrate
| Project/Area Number |
22310083
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | Kansai University |
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Principal Investigator |
AOYAGI Seiji 関西大学, システム理工学部, 教授 (30202493)
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| Co-Investigator(Kenkyū-buntansha) |
SHINGUBARA Shosou 関西大学, システム理工学部, 教授 (10231367)
SUZUKI Masato 関西大学, システム理工学部, 助教 (70467786)
TAKAHASHI Tomokazu 関西大学, システム理工学部, 助教 (20581648)
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| Project Period (FY) |
2010 – 2012
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| Keywords | マイクロセンサー |
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| Research Abstract |
Manufacture methods of high-sensitive accelerometer and magnetic sensor on a ceramic substrate were developed using MEMS technology, which separately detect component of three-axis direction. A large vibration system along one-axis direction for accelerometer was successfully developed. Then, a self-powered sensor detecting inertia force using an electret and a ceramic plate of high-permittivity was successfully developed and characterized. For the development of high-sensitive magnetic sensor, it is proven that films of Co and NiMoFe deposited on a ceramic substrate have surely ferromagnetism characteristics required as a gigantic magneto-resistive (GMR) and/or Tunneling magneto-resistive (TMR) element. Finally, magnetism convergence plates for three-dimensional detection of magnetic field, which is fabricated by only MEMS technology, i.e., without manually handling procedures, was successfully developed.
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