Three-dimensional nano-processing by photoinduced plasma

2012 Fiscal Year Final Research Report

• Project/Area Number: 22350093
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Inorganic industrial materials
• Research Institution: Kyoto University
• Principal Investigator: SHIMOTSUMA Yasuhiko 京都大学, 大学院・工学研究科, 准教授 (40378807)
• Co-Investigator(Renkei-kenkyūsha): SAKAKURA Masaaki 京都大学, 産官学連携センター, 准教授 (90402958)
• Project Period (FY): 2010 – 2012
• Keywords: ガラス

Research Abstract

The photoinduced periodic nanostructure can be observed in the focus region after the femtosecond laser irradiation. Such nanostructure indicates optical anisotropy, namely, form birefringence. We demonstrated the control of phase retardation under the double-pulse configuration by using acoustic optic phase dispersion filter (AOPDF). Compared to the conventional single pulse train, the photoinduced phase retardation by the double-pulse train is much larger, in spite of the same irradiated energy.

Research Products

• [Journal Article] Control of element distribution in glass with femtosecond laser (2012)
  • Author(s): M. Shimizu, M. Sakakura, M. Nishi, Y. Shimotsuma, K. Hirao and K. Miura
  • Journal Title: Proceedings of SPIE Volume: 8244 Pages: 82440O-1-6
  • DOI: DOI:10.1117/12.906644
• [Journal Article] Control of material properties by parallel laser irradiations at multiple laser spots using a spatial light modulator (2012)
  • Author(s): M. Sakakura, T. Tochio, M. Shimizu, N. Yasuda, M. Ohnishi, K. Miura, Y. Shimotsuma and K. Hirao
  • Journal Title: Proceedings of SPIE Volume: 8243 Pages: 824310-1-8
  • DOI: DOI:10.1117/12.912752
• [Journal Article] Fabrication of photo-induced microstructure embedded inside ZnO crystal (2012)
  • Author(s): Y. Ishikawa, Y. Shimotsuma, A. Kaneta, M. Sakakura, M. Nishi, K. Miura, K. Hirao and Y. Kawakami
  • Journal Title: Proceedings of SPIE Volume: 8243 Pages: 82430N-1-7
  • DOI: DOI:10.1117/12.908190
• [Journal Article] Laser-induced transient stress distribution inside a single crystal by time-resolved birefringence imaging (2012)
  • Author(s): T. Tochio, M. Sakakura, S. Kanehira, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Proceedings of SPIE Volume: 8243 Pages: 82430E-1-8
  • DOI: DOI:10.1117/12.908186
• [Journal Article] Homogeneous and elongation-free 3D microfabrication by a femtosecond laser pulse and hologram (2012)
  • Author(s): M. Yamaji, H. Kawashima, J. Suzuki, S. Tanaka, M. Shimizu, K. Hirao, Y. Shimotsuma and K. Miura
  • Journal Title: Journal of Applied Physics Volume: 111 Pages: 083107-1-7
  • DOI: DOI:10.1063/1.4705286
  • Peer Reviewed
• [Journal Article] Evolution of self-assembled nanostructure in glass (2012)
  • Author(s): Y. Shimotsuma, T. Asai, K. Miura, K. Hirao and P. G. Kazansky
  • Journal Title: Journal of Laser Micro/Nanoengineering Volume: 7 Pages: 339-344
  • DOI: DOI:10.2961/jlmn.2012.03.0019
  • Peer Reviewed
• [Journal Article] Localized control of light-matter interactions by using nanoscale asymmetric TiO2 (2012)
  • Author(s): S. Zhou, T. Matsuoka, Y. Shimotsuma, M. Sakakura, M. Nishi, Z. Hong, J. Qiu, K. Hirao and K. Miura
  • Journal Title: Nanotechnology Volume: 23 Pages: 465704-1-6
  • DOI: DOI:10.1088/0957-4484/23/46/465704
  • Peer Reviewed
• [Journal Article] Transient stress imaging after irradiation with a focused femtosecond laser pulse inside a single crystal (2012)
  • Author(s): T. Tochio, M. Sakakura, Y. Shimotsuma, M. Nishi, K. Hirao and K. Miura
  • Journal Title: Japanese Journal of Applied Physics Volume: 51 Pages: 126602-1-6
  • DOI: DOI:10.1143/JJAP.51.126602
  • Peer Reviewed
• [Journal Article] Plasmonically enhanced Faraday effect in metal and ferrite nanoparticles composite precipitated inside glass (2012)
  • Author(s): S. Nakashima, K. Sugioka, K. Tanaka, M. Shimizu, Y. Shimotsuma, K. Miura, K. Midorikawa and K. Mukai
  • Journal Title: Optics Express Volume: 20 Pages: 28191-28199
  • DOI: DOI:10.1364/OE.20.028191
  • Peer Reviewed
• [Journal Article] Three-dimensional structuring inside transparent materials by a phase modulated fs laser beam with a LCOS-SLM (2011)
  • Author(s): M. Sakakura, K. Miura, T. Sawano, Y. Shimotsuma and K. Hirao
  • Journal Title: Proceedings of SPIE Volume: 7920 Pages: 792010-1-6
  • DOI: DOI:10.1117/12.881190
• [Journal Article] Evolution of structural defects in silica glass (2011)
  • Author(s): Y. Shimotsuma
  • Journal Title: Proceedings of International Symposium on Optomechatronic Technologies
  • URL: http://www.isot2011.org/
  • Peer Reviewed
• [Journal Article] Manipulation of self-assembled nanostructure in glass (2011)
  • Author(s): Y. Shimotsuma, M. Sakakura, K. Miura, K. Hirao and P. G. Kazansky
  • Journal Title: Proceedings of International Quantum Electronics Conference / Conference on Lasers and Electro-Optics Pacific Rim Volume: ULMOM Pages: 211-213
  • DOI: DOI:10.1109/IQEC-CLEO.2011.6193678
  • Peer Reviewed
• [Journal Article] Phase transitions induced by ultrafast laser writing in transparent materials (2011)
  • Author(s): P. G. Kazansky, M. Beresna, M. Gecevicius, C. Corbari, Y. Shimotsuma, M. Sakakura, K. Miura, K. Hirao and Y. Bellouard
  • Journal Title: Proceedings of Conference on Lasers and Electro-Optics Volume: JTuI Pages: JTuI106-1-2
  • DOI: DOI:10.1364/CLEO_AT.2011.JTuI106
  • Peer Reviewed
• [Journal Article] Preparation of Nd2Fe14B nanoparticles under femtosecond laser ablation in liquid (2011)
  • Author(s): T. Yamamoto, Y. Shimotsuma, M. Sakakura, M. Nishi, K. Miura, K. Hirao and M. Sagawa
  • Journal Title: IOP Conference Series: Materials Science and Engineering Volume: 18 Pages: 082011-1-4
  • DOI: DOI:10.1088/1757-899X/18/8/082011
  • Peer Reviewed
• [Journal Article] (3-mercaptopropyl)trimethoxysilane-derived porous gel monolith via thioacetal reaction-assisted sol-gel route (2011)
  • Author(s): S. Ito, M. Nishi, K. Kanamori, K. Nakanishi, T. Kurahashi, S. Matsubara, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: IOP Conference Series: Materials Science and Engineering Volume: 18 Pages: 032003-1-4
  • DOI: DOI:10.1088/1757-899X/18/3/032003
  • Peer Reviewed
• [Journal Article] Sol-gel synthesis of Au-nanoparticle dispersed bicontinuous macroporous siloxane gel (2011)
  • Author(s): Y. Hamada, M. Nishi, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: IOP Conference Series: Materials Science and Engineering Volume: 18 Pages: 032002-1-4
  • DOI: DOI:10.1088/1757-899X/18/3/032002
  • Peer Reviewed
• [Journal Article] Radiophotoluminescence from silver-doped phosphate glass (2011)
  • Author(s): Y. Miyamoto, Y. Takei, H. Nanto, T. Kurobori, A. Konnai, T. Yanagida, A. Yoshikawa, Y. Shimotsuma, M. Sakakura, K. Miura, K. Hirao, Y. Nagashima and T. Yamamoto
  • Journal Title: Radiation Measurements Volume: 46 Pages: 1480-1483
  • DOI: DOI:10.1016/j.radmeas.2011.05.048
  • Peer Reviewed
• [Journal Article] Optical properties of a waveguide written inside a LiTaO3 crystal by irradiation with focused femtosecond laser pulses (2011)
  • Author(s): M. Kumatoriya, M. Nakabayashi, M. Sakakura, Y. Shimotsuma, K. Miura, T. Fujiiand K. Hirao
  • Journal Title: Opticsl Review Volume: 18 Pages: 166-170
  • DOI: DOI:10.1007/s10043-011-0017-z
  • Peer Reviewed
• [Journal Article] Unexpected influence of focal depth on nucleation during femtosecond laser crystallization of glass (2011)
  • Author(s): A. Stone, M. Sakakura, Y. Shimotsuma, K. Miura, K. Hirao, V. Dierolf and H. Jain
  • Journal Title: Optical Materials Express Volume: 1 Pages: 990-995
  • DOI: DOI:10.1364/OME.1.000990
  • Peer Reviewed
• [Journal Article] Manipulation of optical anisotropy in silica glass (2011)
  • Author(s): Y. Shimotsuma, M. Sakakura and K. Miura
  • Journal Title: Optical Materials Express Volume: 1 Pages: 803-815
  • DOI: DOI:10.1364/OME.1.000803
  • Peer Reviewed
• [Journal Article] Formation mechanism of element distribution in glass under femtosecond laser irradiation (2011)
  • Author(s): M. Shimizu, M. Sakakura, S. Kanehira, M. Nishi, Y. Shimotsuma, K. Hirao and K. Miura
  • Journal Title: Optics Letters Volume: 36 Pages: 2161-2163
  • DOI: DOI:10.1364/OL.36.002161
  • Peer Reviewed
• [Journal Article] Fabrication and characterization of silicon antireflection structures for infrared rays using a femtosecond laser (2011)
  • Author(s): H. Imamoto, S. Kanehira, X. Wang, K. Kametani, M. Sakakura, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Optics Letters Volume: 36 Pages: 1176-1178
  • DOI: DOI:10.1364/OL.36.001176
  • Peer Reviewed
• [Journal Article] Improved phase hologram design for generating symmetric light spots and its application for laser writing of waveguides (2011)
  • Author(s): M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Optics Letters Volume: 36 Pages: 1065-1067
  • DOI: DOI:10.1364/OL.36.001065
  • Peer Reviewed
• [Journal Article] Photosensitivity control of an isotropic medium through polarization of light pulses with tilted intensity front (2011)
  • Author(s): P. G. Kazansky, Y. Shimotsuma, M. Sakakura, M. Beresna, M. Gecevi?ius, Y. Svirko, S.Akturk, J. Qiu, K. Miura and K. Hirao
  • Journal Title: Optics Express Volume: 19 Pages: 20657-20664
  • DOI: DOI:10.1364/OE.19.020657
  • Peer Reviewed
• [Journal Article] Observation of laser-induced stress waves and mechanism of structural changes inside rock-salt crystals (2011)
  • Author(s): M. Sakakura, T. Tochio, M. Eida, Y. Shimotsuma, S. Kanehira, M. Nishi, K. Miuraand K. Hirao
  • Journal Title: Optics Express Volume: 19 Pages: 17780-17789
  • DOI: DOI:10.1364/OE.19.017780
  • Peer Reviewed
• [Journal Article] Modification of long range order in germanate glass by ultrafast laser (2011)
  • Author(s): X. Wang, M. Sakakura, Y. Liu, J. Qiu, Y. Shimotsuma, K. Hirao and K. Miura
  • Journal Title: Chemical Physics Letters Volume: 511 Pages: 266-269
  • DOI: DOI:10.1016/j.cplett.2011.06.063
  • Peer Reviewed
• [Journal Article] Thermal and shock induced modification inside a silica glass by focused femtosecond laser pulse (2011)
  • Author(s): M. Sakakura, M. Terazima, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Journal of Applied Physics Volume: 109 Pages: 023503-1-8
  • DOI: DOI:10.1063/1.3533431
  • Peer Reviewed
• [Journal Article] Nano-periodic structure formation on titanium thin film with a Femtosecond laser (2011)
  • Author(s): N. Wu, Z. Wang, X. Wang, Y. Shimotsuma, M. Nishi, K. Miura and K. Hirao
  • Journal Title: ournal of the Ceramic Society of Japan Volume: 119 Pages: 898-901
  • DOI: DOI:10.2109/jcersj2.119.898
  • Peer Reviewed
• [Journal Article] Space selective reduction of europium ions via SrF2 crystals induced by high repetition rate femtosecond laser (2011)
  • Author(s): X. Wang, N. Wu, M. Shimizu, M. Sakakura, Y. Shimotsuma, K. Miura, S. Zhou, J. Qiuand K. Hirao
  • Journal Title: ournal of the Ceramic Society of Japan Volume: 119 Pages: 939-941
  • DOI: DOI:10.2109/jcersj2.119.939
  • Peer Reviewed
• [Journal Article] Silicon precipitation via photoinduced reaction using femtosecond laser (2011)
  • Author(s): M. Nishimura, S. Kanehira, M. Sakakura, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Journal of Nanoscience and Nanotechnology Volume: 11 Pages: 10087-10092
  • DOI: DOI:10.1166/jnn.2011.4988
  • Peer Reviewed
• [Journal Article] Intermetallic magnetic nanoparticle precipitation by femtosecond laser fragmentation in liquid (2011)
  • Author(s): T. Yamamoto, Y. Shimotsuma, M. Sakakura, M. Nishi, K. Miura and K. Hirao
  • Journal Title: Langmuir Volume: 27 Pages: 8359-8364
  • DOI: DOI:10.1021/la201211e
  • Peer Reviewed
• [Journal Article] Micro-hole processing of polyimide film by ultra-short laser pulses and its applications (2010)
  • Author(s): M. Ohnishi, H. Shikata, M. Sakakura, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Applied Physics A Volume: 98 Pages: 123-127
  • DOI: DOI:10.1007/s00339-009-5450-5
  • Peer Reviewed
• [Journal Article] Space-selective phase separation inside a glass by controlling compositional distribution with femtosecond-laser irradiation (2010)
  • Author(s): M. Shimizu, K. Miura, M. Sakakura, M. Nishi, Y. Shimotsuma, S. Kanehira, T. Nakaya and K. Hirao
  • Journal Title: Applied Physics A Volume: 100 Pages: 1001-1005
  • DOI: DOI:10.1007/s00339-010-5879-6
  • Peer Reviewed
• [Journal Article] Selective growth of gold nanoparticles on FIB-induced amorphous phase of Si substrate (2010)
  • Author(s): T. Matsuoka, M. Nishi, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Journal of the Ceramic Society of Japan Volume: 118 Pages: 575-578
  • DOI: DOI:10.2109/jcersj2.118.575
  • Peer Reviewed
• [Journal Article] Photo-initiation of ZnO nanorod formation by femtosecond laser irradiation (2010)
  • Author(s): N. Wu, Y. Shimotsuma, M. Nishi, M. Sakakura, K. Miura and K. Hirao
  • Journal Title: Journal of the Ceramic Society of Japan Volume: 118 Pages: 147-151
  • DOI: DOI:10.2109/jcersj2.118.147
  • Peer Reviewed
• [Journal Article] Emission mechanism of radiophotoluminescence in Ag- doped phosphate glass (2010)
  • Author(s): Y. Miyamoto, T. Yamamoto, K. Kinoshita, S. Koyama, Y. Takei, H. Nanto, Y. Shimotsuma, M. Sakakura, K. Miura and K. Hirao
  • Journal Title: Radiation Measurements Volume: 45 Pages: 546-549
  • DOI: DOI:10.1016/j.radmeas.2010.01.012
  • Peer Reviewed
• [Journal Article] Emission and excitation mechanism of radio- photoluminescence in Ag+-activated phosphate glass (2010)
  • Author(s): Y. Miyamoto, K. Kinoshita, S. Koyama, Y. Takei, H. Nanto, T. Yamamoto, M. Sakakura, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Nuclear Instruments and Methods in Physics Research A Volume: 619 Pages: 71-74
  • DOI: DOI:10.1016/j.nima.2010.02.076
  • Peer Reviewed
• [Journal Article] Fabrication of three-dimensional 1 × 4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam (2010)
  • Author(s): M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Optics Express Volume: 18 Pages: 12136-12143
  • DOI: DOI:10.1364/OE.18.012136
  • Peer Reviewed
• [Journal Article] Ionizing radiation sensor utilizing radiophotoluminescence in Ag+-activated phosphate glass and itsapplication to environmental radiation monitorin (2010)
  • Author(s): Y. Miyamoto, K. Kinoshita, H. Kobayashi, A. Fujiwara, S. Koyama, Y. Takei, H. Nanto, T. Yamamoto, T. Kurobori, K. Yanagida, A. Yoshikawa, M. Sakakura, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Sensors and Materials Volume: 22 Pages: 235-245
  • DOI: DOI:10.1007/s00339-010-5879-6
  • Peer Reviewed
• [Journal Article] Ultrafast manipulation of self-assembled form birefringence in glass (2010)
  • Author(s): Y. Shimotsuma, M. Sakakura, P. G. Kazansky, M. Beresna, J. Qiu, K. Miura and K. Hirao
  • Journal Title: Advanced Materials Volume: 22 Pages: 4039-4043
  • DOI: DOI:10.1002/adma.201000921
  • Peer Reviewed
• [Journal Article] Phase control of iron silicides using femtosecond laser irradiation (2010)
  • Author(s): S. Kanehira, M. Sakakura, Y. Shimotsuma, M. Eida, K. Miura and K. Hirao
  • Journal Title: Applied Physics A Volume: 101 Pages: 81-85
  • DOI: DOI:10.1007/s00339-010-5763-4
  • Peer Reviewed
• [Journal Article] Environmental radiation monitoring using solid state dosimeter (2010)
  • Author(s): S. Koyama, Y. Miyamoto, A. Fujiwara, H. Kobayashi, K. Ajisawa, H. Komori, Y. Takei, H. Nanto, T. Kurobori, H. Kakimoto, M. Sakakura, Y. Shimotsuma, K. Miura, K. Hirao and T. Yamamoto
  • Journal Title: Sensors and Materials Volume: 22 Pages: 377-385
  • Peer Reviewed
• [Journal Article] Mechanism of heat-modification inside a glass after irradiation with high-repetition rate femtosecond laser pulses (2010)
  • Author(s): M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura and K. Hirao
  • Journal Title: Journal of Applied Physics Volume: 108 Pages: 073533-1-10
  • DOI: DOI:10.1063/1.3483238
  • Peer Reviewed
• [Journal Article] Elastic and thermal dynamics in femtosecond laser-induced structural change inside glasses studied by the transient lens method (2010)
  • Author(s): M. Sakakura, M. Terazima, Y. Shimotsuma, K. Miura and K. Hirao
  • Journal Title: Laser Chemistry Volume: 2010 Pages: 148268-1-15
  • DOI: DOI:10.1155/2010/148268
  • Peer Reviewed
• [Presentation] Avant-Garde femtosecond laser processing: From new phenomena to innovative devices (2012)
  • Author(s): 下間 靖彦
  • Organizer: レ ザー加工学会
  • Place of Presentation: アクトシティ浜松コングレスセンター.
  • Year and Date: 2012-12-14
• [Presentation] 超短パルスレーザーを利用したナノ物質創成の新展開 (2012)
  • Author(s): 下間 靖彦
  • Organizer: ナノファイバー学会第3回年次大会
  • Place of Presentation: 東北大学金属材料研究所
  • Year and Date: 2012-10-12
• [Presentation] Nanostructuring under ultrashort pulse laser irradiation (2012)
  • Author(s): Y. Shimotsuma
  • Organizer: Progress In Electromagnetics Research Symposium
  • Place of Presentation: Moscow State Institute of Radio Engineering, Electronics and Automation, Russia
  • Year and Date: 2012-08-20
• [Presentation] Optical anisotropy of self-assembled nanostructure in glass (2012)
  • Author(s): Y. Shimotsuma
  • Organizer: 2012 Advanced Photonics Congress
  • Place of Presentation: Colorado Springs, USA
  • Year and Date: 2012-06-20
• [Presentation] Evolution of self-assembled nanostructure in glass (2012)
  • Author(s): Y. Shimotsuma
  • Organizer: The 13th International Symposium on Laser Precision Microfabrication
  • Place of Presentation: The Catholic University of America, USA
  • Year and Date: 2012-06-15
• [Presentation] Evolution of structural defects in silica glass (2011)
  • Author(s): Y. Shimotsuma
  • Organizer: International Symposium on Optomechatronic Technologies
  • Place of Presentation: The Chinese University of Hong Kong, China
  • Year and Date: 2011-11-02
• [Presentation] Manipulation of self-assembled nanostructure in glass (2011)
  • Author(s): Y. Shimotsuma
  • Organizer: International Quantum Electronics Conference / Conference on Lasers and Electro-Optics Pacific Rim
  • Place of Presentation: Sydney Convention and Exhibition Centre, Australia
  • Year and Date: 2011-08-29
• [Presentation] Manipulation of form birefringence in isotropic material (2010)
  • Author(s): Y. Shimotsuma, M. Sakakura, P. G. Kazansky, K. Miura and K. Hirao
  • Organizer: CLEO/QELS 2010
  • Place of Presentation: San Jose McEnery Convention Center, USA
  • Year and Date: 2010-05-17
• [Book] ナノファイバー実用化技術と用途展開の最前線 (2012)
  • Author(s): 下間靖彦
  • Total Pages: 182-200
  • Publisher: シーエムシー出版
• [Book] ナノインプリント/ナノ加工技術とオプトテクノロジー 第3節 フェムト秒レーザーによる微細周期構造の形成とその応用 (2012)
  • Author(s): 下間靖彦
  • Total Pages: 238-250
  • Publisher: 情報機
• [Book] セラミックス機能化ハンドブック (2011)
  • Author(s): 三浦清貴、下間靖彦、坂倉政明、平尾一之
  • Total Pages: 593
  • Publisher: エヌ・ティーエス
• [Book] Nanowires -Fundamental Research- (2011)
  • Author(s): Y. Shimotsuma, K. Miura, K. Hirao
  • Total Pages: 552
  • Publisher: InTech