2013 Fiscal Year Final Research Report
Direct micromachining of polydimethylsiloxane using laser plasma soft X-rays
| Project/Area Number |
22360016
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | University of Tsukuba |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
OKADA Tatsuo 九州大学, 大学院・システム情報科学研究院, 教授 (90127994)
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| Project Period (FY) |
2010-04-01 – 2014-03-31
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| Keywords | レーザープラズマ軟X線 / ポリジメチルシロキサン / シリコーンエラストマー / マイクロ加工 / 極端紫外光 / 光直接加工 |
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| Research Abstract |
We have investigated poludimethylsilonxan (PDMS) micromaching by ablation using laser plasma soft X-rays. We have achieved precise michromachining of PDMS at one micrometer scale. The micromachining properties are governed by power density of incident laser plasma soft X-rays on PDMS surfaces, while the wavelength do not affect the properties. It is found that the chemical structures is not modified even after the irradiation of laser plasma soft X-rays. Thus, we have achieved proerties suitable for PDMS micromachining.
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