2012 Fiscal Year Final Research Report
Nano profile measurement by depolarization microscope
| Project/Area Number |
22360057
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Production engineering/Processing studies
|
|---|
| Research Institution | Utsunomiya University |
|---|
Principal Investigator |
OTANI Yukitoshi 宇都宮大学, オプティクス教育研究センター, 教授 (10233165)
|
|---|
| Project Period (FY) |
2010 – 2012
|
| Keywords | 超精密計測 / ナノ形状 / ミュラー行例 / 散乱光解析 / 偏光解消 |
|---|
| Research Abstract |
An optical fiber type of polarimeter which is based on a depolarization microscopy is proposed to evaluate the surface profiles of nanostructures. The best combination of rotating speed of a retarder and an analyzer for dual rotating Stokes polarimeter is carried out in the proportion of one part to three from generated analysis for Stokes parameters detection. A nanostructure profile is determined from the polarization information which happens reflection and scatter of sample structures by depolarization microscopy
|
