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2012 Fiscal Year Final Research Report

Development of "Traveling Wave" Air Bearing which Exceeds Limitation of Traditional Principles

Research Project

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Project/Area Number 22360070
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionNagoya University

Principal Investigator

SHAMOTO Eiji  名古屋大学, 大学院・工学研究科, 教授 (20216146)

Co-Investigator(Kenkyū-buntansha) HINO Rei  名古屋大学, エコトピア科学研究所, 准教授 (80273762)
SUZUKI Norikazu  名古屋大学, 大学院・工学研究科, 准教授 (00359754)
Project Period (FY) 2010 – 2012
Keywordsトライボロジー / 機械要素 / 流体軸受 / 進行波 / 非接触浮上
Research Abstract

A high-performance fluid bearing which utilizes traveling waves has been proposed and evaluated in this research. First, ideal performance of the bearing is calcula ted by utilizing the finite element model at appropriate driving conditions and device dimensions. Next, a new device with higher rigidity and accuracy is proposed, where many thin piezoelectric plates support the bearing plate directly in the supporting direction. In addition, modular actuators which generate the traveling waves aredeveloped to attain steady performance. As a result, it is verified that the developed device can generate bearing force of 68.8 N and has rigidity of 27.4 N/ μm at floating displacement of 4 μm. Furthermore, a new type of traveling-wave bearing is proposed which utilizes liquid as the bearing medium. It is clarified analytically that the liquid bearing has considerably higher performance .

  • Research Products

    (15 results)

All 2013 2012 2011 2010 Other

All Journal Article (11 results) (of which Peer Reviewed: 10 results) Presentation (3 results) Remarks (1 results)

  • [Journal Article] 新しい原理に基づく流体軸受2013

    • Author(s)
      社本 英二
    • Journal Title

      トライボロジスト

      Volume: 58-2(掲載確定)

  • [Journal Article] 研磨パッドの微細凹凸接触を考慮した CMP プロセスの EHL 解析2013

    • Author(s)
      橋本洋平, 鈴木教和,浅羽正和, 樋野励,社本英二
    • Journal Title

      精密工学会誌

      Volume: 79-2 Pages: 73-80

    • Peer Reviewed
  • [Journal Article] 機械構造の結合部における摩擦減衰の解明と定量的予測(ねじり振動が作用する場合)2012

    • Author(s)
      品川 幹,社本 英二
    • Journal Title

      日本機械学会論文集C編

      Volume: 78 - 2 Pages: 2048-206

    • Peer Reviewed
  • [Journal Article] パイこね変換に基づく量産対応・高速ミキサの開発2012

    • Author(s)
      尾本悠輔,加藤大香士,鈴木教和,安井隆雄,大里恵子,加地範匡,渡慶次学,馬場嘉信,酒井康彦,社本英二
    • Journal Title

      日本機械学会論文集 B1 編

      Volume: 78-2 Pages: 762-768

    • Peer Reviewed
  • [Journal Article] CMP プロセスにおける接触応力の動的有限要素法解析2011

    • Author(s)
      橋本洋平, 鈴木教和, 樋野励, 社本英二
    • Journal Title

      精密工学会誌

      Volume: 77-2 Pages: 513-519

    • Peer Reviewed
  • [Journal Article] Simultaneous double-sided milling of flexible plates with high accuracy and high efficiency-Suppression of forced chatter vibration with synchronized single-tooth cutters2011

    • Author(s)
      Tatsuya Mori, Tomoki Hiramatsu and Eiji Shamoto
    • Journal Title

      Precision Engineering

      Volume: Vol.3 Pages: 416-423

    • Peer Reviewed
  • [Journal Article] Prediction and Compensation of Motion Accuracy in a Linear Motion Bearing Table2011

    • Author(s)
      Gyungho Khim, Chun Hong Park, Eiji Shamoto, and Seung Woo Kim
    • Journal Title

      Precision Engineering

      Volume: Vol.35, Issue 3 Pages: 393-399

    • Peer Reviewed
  • [Journal Article] Control of chip flow with guide grooves for continuous chip disposal and chip-pulling turning2011

    • Author(s)
      Eiji Shamoto, T omoya Aoki, BurakSencer, Norikazu Suzuki, Rei Hino, Tomio Koide
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: Vol.60 Pages: 125-128

    • Peer Reviewed
  • [Journal Article] Micro/nano sculpturing of hardened steel by controlling vibration amplitude in elliptical vibration cutting2011

    • Author(s)
      Norikazu Suzuki, Hideo Yokoi, Eiji Shamoto
    • Journal Title

      Precision Engineering

      Volume: Vol.35, Issue 1 Pages: 44-50

    • Peer Reviewed
  • [Journal Article] Chatter Stability in Turning and Milling with in Process Identified Process Damping2010

    • Author(s)
      Yusuke Kurata, S. Doruk Merdol, Yusuf Altintas, Norikazu Suzuki, Eiji Shamoto
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: Vol. 4, No. 6 Pages: 1107-1118

    • Peer Reviewed
  • [Journal Article] Suppression of regenerative chatter vibration in simultaneous double-sided milling of flexible plates by speed difference2010

    • Author(s)
      Eiji Shamoto, Tatsuya Mori, Kohei Nishimura, Tomoki Hiramatsu, Yusuke Kurata
    • Journal Title

      CIRP Annals -Manufacturing Technology

      Volume: Vol.59 Pages: 387-390

    • Peer Reviewed
  • [Presentation] Proposal and Analysis of an Innovative Liquid Bearing Utilizing Traveling Waves2012

    • Author(s)
      Ying-Jie Li, Burak Sencer and Eiji Shamoto
    • Organizer
      ICPT2012 (The 5th International Conference on Positioning Technology 2012)
    • Place of Presentation
      Kaohsiung, Taiwan
    • Year and Date
      20121114-16
  • [Presentation] 進行波を利用した非接触流体軸受に関する研究- モジュール式の進行波圧電アクチュエータ及び精密スライダの開発2012

    • Author(s)
      小松 裕貴,加藤 大香士, Sencer Burak,鈴木 教和,社本 英二
    • Organizer
      精密工学会春季大会
    • Place of Presentation
      首都大学東京(東京都)
    • Year and Date
      2012-03-14
  • [Presentation] 多段振動型気体軸受の提案2010

    • Author(s)
      社本 英二,小松 裕貴,山路 文恵,大脇圭裕,鈴木 教和
    • Organizer
      精密工学会秋季大会
    • Place of Presentation
      名古屋大学(愛知県)
    • Year and Date
      2010-09-28
  • [Remarks]

    • URL

      http://www.mech.nagoya-u.ac.jp/upr/

URL: 

Published: 2014-08-29  

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