2012 Fiscal Year Final Research Report
Study of elementary process of novel cleaning method by investigation of surrounding condensable vapor effect on single droplet drag reduction
| Project/Area Number |
22360073
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Fluid engineering
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| Research Institution | Hokkaido University |
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Principal Investigator |
WATANABE Masao 北海道大学, 大学院・工学研究院, 教授 (30274484)
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| Co-Investigator(Kenkyū-buntansha) |
SANADA Toshiyuki 静岡大学, 工学部, 准教授 (50403978)
KOKOBAYASHI Kazumichi 北海道大学, 大学院・工学研究院, 准教授 (80453140)
YAGUCHI Hisao 群馬工業高等専門学校, 機械工学科, 助教 (20568521)
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| Project Period (FY) |
2010 – 2012
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| Keywords | 混相流 / 液滴 / 液滴衝突 / 気液界面 / 液膜 / 相変化 / スプラッシュ / 洗浄 |
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| Research Abstract |
In the cleaning processes of manufacturing semiconductor deVices, two-fluidspray cleaning technique is widely used. In this study, we fbcus our attention to the elementary process ofthis cleaning technique, i.e. a single droplet impact on a solid surface. We experimentally observe impact ofsingle droplet on a rigid solid surface. Especially we focus on the effects of surfaces tension, surfaceroughness and surrounding pressure. Decrease of the surrounding gas pressure makes droplets alwayscreate lamella even in the cases with low surface tension and rough surfaces
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