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2012 Fiscal Year Final Research Report

Gecko-inspired electrostatic chuck consisting of polymeric electrostatic inductive fibers

Research Project

  • PDF
Project/Area Number 22360102
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTokyo Institute of Technology

Principal Investigator

SAITO Shigeki  東京工業大学, 大学院・理工学研究科, 准教授 (30313349)

Co-Investigator(Kenkyū-buntansha) KIKUTANI Takeshi  東京工業大学, 理工学研究科, 教授 (70153046)
TAKAHASHI Kunio  東京工業大学, 理工学研究科, 准教授 (70226827)
Project Period (FY) 2010 – 2012
Keywordsマイクロ / ナノメカトロニクス / 生産技術 / 生体模倣
Research Abstract

In this research, an ESC that can handle curved/rough surface is developed. An ESC consisting of compliant electrostatic inductive fibers which transform according to the profile of surface has been proposed for such use. The fundamental idea of comes from the inspiration based on gecko which can quickly adhere and move on walls or ceilings having curved/rough surface; it is well-known that the tip of such surprising capability is due to the hierarchical fiber micro/nano-structure on the finger-tips. The potential and feasibility of the fiber ESC proposed are shown by prototyping electrostatic inductive fibers and new type of ESC consisting of the fibers that can work for curved or rough surface through both experimental and theoretical approaches.

  • Research Products

    (5 results)

All 2013 2012 2011 2010

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (4 results)

  • [Journal Article] Compliant electrostatic chuck based on hairy microstructure2013

    • Author(s)
      Shigeki SAITO, Fumiaki SODA Radon DHELIKA, Kunio TAKAHASHI, Wataru TAKARADA, Takeshi KIKUTANI
    • Journal Title

      Smart Materials and Structures

      Volume: Vol.22 Pages: 015019(1-6)

    • DOI

      doi:10.1088/0964-1726/22/1/015019

    • Peer Reviewed
  • [Presentation] 双極型静電誘導ファイバーにおける電極断面形状の発生力への影響2012

    • Author(s)
      前薗圭佑,高橋邦夫,齋藤滋規
    • Organizer
      2012年度精密工学会春季大会学術講演会講演論文集
    • Place of Presentation
      首都大学東京,東京
    • Year and Date
      20120000
  • [Presentation] Electrostatic chuck consisting of electrostatic inductive polymer fibers for handling of curved surface2011

    • Author(s)
      Kenji SAWAI, Wataru TAKARADA, Takeshi KIKUTANI, Kunio TAKAHASHI, Shigeki SAITO
    • Organizer
      Abstract in Material Research Society 2011 Fall Meeting, V17.41
    • Place of Presentation
      Hynes Convention Center, Boston,MA, USA
    • Year and Date
      20110000
  • [Presentation] 静電誘導ファイバー集積構造による曲面対応静電チャックの開発2011

    • Author(s)
      澤井賢司,宝田亘,鞠谷雄士,高橋邦夫,齋藤滋規
    • Organizer
      2011年度精密工学会春季大会論文集
    • Place of Presentation
      東洋大学,東京
    • Year and Date
      20110000
  • [Presentation] 静電誘導ファイバーによる物体吸着機構の開発2010

    • Author(s)
      早田史明,宝田亘,鞠谷雄士,齋藤滋規
    • Organizer
      2010年度精密工学会春季大会論文集
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      20100000

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Published: 2014-08-29  

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