2012 Fiscal Year Final Research Report
Study on the fabrication and high-performance of ultra-micro lithium secondary batteries embedded in silicon chips
| Project/Area Number |
22550167
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Functional materials/Devices
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| Research Institution | Hosei University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
KUSHIDA Kazumasa 大阪教育大学, 教育学部, 准教授 (80372639)
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| Project Period (FY) |
2010 – 2012
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| Keywords | 超微小電池 / リチウム2次電池 / シリコンチップ埋め込み |
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| Research Abstract |
All-solid-state Li ion secondary battery, consisting of multiple layers (Poly Si anode / a poly methacrylate acetate (PMMA) electrolyte / LiMn2O4 cathode), is prepared using Si very-large-scale integration technologies. The PMMA solid electrolyte containing LiClO4 for the battery is embedded into an individual trench (300×300 μm2 in area and 2.0 μm in depth) of a double insulating layer (Si3N4/SiO2), which is directly stacked on a poly Si layer, leading to a Li free anode. The individual battery demonstrates a specific capacity of 3.70 nAh/cm2 obtained for the charge of 3 nA anddischarge of 10 pA.
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