2013 Fiscal Year Final Research Report
Three Dimensional Micro-structure Formation on Si Surfaces Using Surface-Diffusion-Driven Shape Transformation
| Project/Area Number |
22560023
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Osaka University |
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Principal Investigator |
SUDOH Koichi 大阪大学, 産業科学研究所, 准教授 (90314426)
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| Co-Investigator(Kenkyū-buntansha) |
NAITO Muneyuki 甲南大学, 理工学部, 准教授 (10397721)
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| Project Period (FY) |
2010-04-01 – 2013-03-31
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| Keywords | 表面 / シリコン / 微細構造 / 表面拡散 |
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| Research Abstract |
Spontaneous shape transformation occurs as high-aspect-ratio hole patterns fabricated on Si substrates are annealed in non-oxidizing ambient at high temperatures. In this project, formation technology of three dimensional micro-structures applying the spontaneous shape transformation was investigated. Observing the shape transformation processes for various hole patterns, three dimensional structures created using this method were shown. Performing numerical simulations based on continuum theory, the dominant mass transport mechanism for the observed shape transformation was fond to be surface diffusion.
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