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2012 Fiscal Year Final Research Report

Synthesis and Mechanical Characterization of Nano-Columnar DLC Coating Toward Application of MEMS

Research Project

  • PDF
Project/Area Number 22560089
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionShibaura Institute of Technology

Principal Investigator

AIZAWA Tatsuhiko  芝浦工業大学, デザイン工学部, 教授 (10134660)

Project Period (FY) 2010 – 2012
KeywordsDLC / ナノカラム構造化 / 自己組織化 / カラム間グラファイト化 / 電子ビーム / 異常弾性挙動 / カラム間選択ドーピング / 接触角制御
Research Abstract

Nano-columnar DLC (Diamond-Like Carbon) or amorphous carbon coating was made by PVD (Physical Vapor Deposition) method with electron beam irradiation. Its nano-structure and exotic mechanical properties were analyzed by AFM (Atomic Force Microscope) to investigate the nano-columnar structure and its relationship in the surface contact angle from hydrophilic to hydrophobic states.

  • Research Products

    (7 results)

All 2013 2012

All Journal Article (3 results) Presentation (3 results) Book (1 results)

  • [Journal Article] CHARACTERIZATION OF CU-DOPED NANOCOLUMNAR DLC COATING.2013

    • Author(s)
      Satoru Yukawa, Tatsuhiko Aizawa
    • Journal Title

      Proc. 7th SEATUC Conference

      Pages: 7-6

  • [Journal Article] Analysis of nano-columnar DLC thin Films by the Atomic Force Microscopy2013

    • Author(s)
      Foo Jin Hoe, Ryo Suenaga, Tatsuhiko Aizawa
    • Journal Title

      Proc. 7th SEATUC Conference

      Pages: 7-6

  • [Journal Article] Synthesis and characterization of doped and undoped nano-columnar DLC coating2013

    • Author(s)
      Foo Jin Hoe, Tatsuhiko Aizawa, Satoru Yukawa
    • Journal Title

      J. Tecknologi

      Volume: 62(1) Pages: 17-24

  • [Presentation] Synthesis and characterization of copper doped nano-columnar DLC coating2013

    • Author(s)
      S. Yukawa, T. Aizawa
    • Organizer
      7th SEATUC Conference
    • Place of Presentation
      Bandung
    • Year and Date
      20130306-07
  • [Presentation] Analysis of nano-columnar DLC thin films by the atomic force microscopy2013

    • Author(s)
      Foo Jin Hoe, R. Suenaga, T. Aizawa
    • Organizer
      7th SEATUC Conference
    • Place of Presentation
      Bandung
    • Year and Date
      20130306-07
  • [Presentation] Characterization of Cu doped nano-columnar DLC coating2012

    • Author(s)
      S. Yukawa, T. Aizawa
    • Organizer
      ICMCTF-2012
    • Place of Presentation
      San Diego
    • Year and Date
      20120427-0502
  • [Book] 「アジアの経済発展と産業技術」第10章2013

    • Author(s)
      相澤龍彦
    • Publisher
      ナカニシヤ出版

URL: 

Published: 2014-08-29  

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