2012 Fiscal Year Final Research Report
Profile Measurement System of Phase-Shifting Point Diffraction Interferometer with Spherical Reference Wavefronts Generated byTwo Optical Fibers
| Project/Area Number |
22560109
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Osaka University |
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Principal Investigator |
NAKANO Motohiro 大阪大学, 大学院・工学研究科, 准教授 (40164256)
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| Co-Investigator(Kenkyū-buntansha) |
INOUE Haruyuki 大阪大学, 大学院・工学研究科, 助教 (30304009)
OSHIKANE Yasushi 大阪大学, 大学院・工学研究科, 助教 (40263206)
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| Project Period (FY) |
2010 – 2012
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| Keywords | 精密位置決め / 加工計測 / PDI(Point Diffraction Interferometer) / 位相シフト干渉計 / 光ファイバ |
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| Research Abstract |
A phase-shifting point diffraction interferometer (PS/PDI) withtwo optical fibers has been developed for absolute surface profile measurement of large aperture optics. Since the PS/PDI has flexibility of the positions for two point lightsources, it can generate the fringes included information for surface profile without use of imaging optics. Surface profile of a mirror can be reconstructed precisely conducting wavefront analyses by digital holography. As the application to aspheric mirror, profile measurement of a flat mirror has been studied.
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