2012 Fiscal Year Final Research Report
Nanofabrication and Strengthening of Silicon Single Crystal by UsingSPM
| Project/Area Number |
22560124
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Aichi Institute of Technology |
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Principal Investigator |
TAKAGI Makoto 愛知工業大学, 工学部, 教授 (40288428)
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| Co-Investigator(Kenkyū-buntansha) |
MATSUMURO Akihito 愛知工業大学, 工学部, 教授 (80173889)
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| Project Period (FY) |
2010 – 2012
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| Keywords | MEMS / シリコン / ナノ加工 / SPM / 機械的性質 |
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| Research Abstract |
Change in microstructure and mechanical properties of a Si surface after scanning-scratching tests under a very small loading force in an AFM was investigated by cross-sectional TEM observations and nano-indentation test. Amorphous Si phase and dislocations were generated by scratching, and amorphous Si phase was removed during scanning-scratching. The scratched sub-surface got harder.
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