Study on Ultrasonic 2-axis Vibration Assisted Polishing

2012 Fiscal Year Final Research Report

• Project/Area Number: 22560125
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Chubu University
• Principal Investigator: SUZUKI Hirofumi 中部大学, 工学部, 教授 (20282098)
• Project Period (FY): 2010 – 2012
• Keywords: 超音波研磨 / 砥粒加工 / マイクロ非球面金型 / 超音波2軸振動 / 表面粗さ / 形状精度 / 振動解析 / 圧電素子

Research Abstract

Micro glass lenses for digital cameras and blue laser DVD pick-up devices are generally molded by using micro aspheric ceramic molds made of tungsten carbides. These molds are finished by micro polishing using loose abrasives after grinding. Improvement to the accuracy of the molds is necessary, and high numerical aperture (NA) optics with steep angles are required. In order to finish the molds of high NA, an ultrasonic two-axis vibration assisted polishing machine with piezo-electric actuators was proposed and developed. Some micro aspheric molds made of binderless tungsten carbide were polished, and surface roughness of 8 nm Rz was obtained.

Research Products

• [Journal Article] 低周波振動援用による微細構造をもつ金型の研磨法の研究 (2012)
  • Author(s): 林偉民,徐世傑,矢野健,藤本正和,呉勇波,鈴木浩文,樋口俊郎
  • Journal Title: 型技術 Volume: 27,7 Pages: 118-119
• [Journal Article] 圧電素子を用いた振動研磨による微細形状の超精密精密研磨 (2011)
  • Author(s): 鈴木浩文,岡田睦,徐世傑,矢野健,樋口俊郎
  • Journal Title: 型技術 Volume: 26,7 Pages: 42-43
• [Journal Article] レーザプローブ走査方式の超精密測定の研究-青色レーザ利用による高精度化 (2011)
  • Author(s): 岡田睦,鈴木浩文,三浦勝弘,松岡伸夫
  • Journal Title: 型技術 Volume: 26,7 Pages: 134-135
• [Presentation] Polishing Experiments of Micro Aspheric Mold Using Vibration Assisted Polishing Machine (2012)
  • Author(s): 郭江,鈴木浩文,森田晋也,山形豊,樋口俊郎
  • Organizer: 2012年度精密工学会春季大会学術講演会講演論文集
  • Year and Date: 20120000
• [Presentation] Development of Micro Polishing System by Using Magnetostriction Vibrator (2011)
  • Author(s): J. GUO, H. Suzuki, K. Yoshida, T. Higuchi
  • Organizer: 2011 年度精密工学会春季大会学術講演会講演論文集
  • Year and Date: 20110000
• [Presentation] 低周波振動援用研磨による金型材料の加工特性 (2011)
  • Author(s): 小林直貴,久保田享,林偉民,呉勇波,藤本正和,徐世傑,矢野健,山形豊,樋口俊郎,鈴木浩文,牧野俊清
  • Organizer: 2011年度精密工学会春季大会学術講演会講演論文集
  • Year and Date: 20110000
• [Presentation] Study on precision polishing of micro structured mold -Development of micro polishing system using piezoelectric actuator-incorporated with mechanical transformer- (2011)
  • Author(s): S.K. Chee, H. Suzuki , M. Okada,K. Yoshida, W. Lin, T. Yano, T. Higuchi
  • Organizer: 2011年度精密工学会春季大会学術講演会講演論文集
  • Year and Date: 20110000
• [Presentation] Preliminary studies on precision polishing of micro structured mold -Development of micro polishing system using piezoelectric actuator incorporated with mechanical transformer - (2011)
  • Author(s): S. K. Chee, H. Suzuki, M. Okada, K. Yoshida, W. Lin, T. Yano, T. Higuchi
  • Organizer: 2011 年度砥粒加工学会学術講演会講演論文集
  • Year and Date: 20110000
• [Presentation] マイクロ非球面研磨用磁歪振動研磨装置の開発 (2011)
  • Author(s): 郭江,鈴木浩文,樋口俊郎
  • Organizer: 2011年度砥粒加工学会学術講演会講演論文集
  • Year and Date: 20110000
• [Presentation] 低周波振動援用研磨法による金型材料の加工効果 (2011)
  • Author(s): 林偉民,小林直樹,藤本正和,呉勇波,徐世傑,矢野健,鈴木浩文
  • Organizer: 2011年度砥粒加工学会学術講演会講演論文集
  • Year and Date: 20110000
• [Remarks]
  • URL: http://www.chubu.ac.jp/about/faculty/profile/81055a74934afd47b755fc8aca81a2b9e76024dc.html
• [Patent(Industrial Property Rights)] 研磨装置 (2012)
  • Inventor(s): 徐世傑,鈴木浩文,林偉民,樋口俊郎,吉田和史,矢野健
  • Industrial Property Rights Holder: 同上
  • Industrial Property Number: 特開公 2012121130
  • Filing Date: 2012-06-28
• [Patent(Industrial Property Rights)] 変位拡大機構及び研磨装置 (2012)
  • Inventor(s): 徐世傑,矢野健,鈴木浩文,林偉民,樋口俊郎,吉田和史
  • Industrial Property Rights Holder: 同上
  • Industrial Property Number: 特開公 2012175746
  • Filing Date: 2012-09-10