2012 Fiscal Year Final Research Report
Error analysis and reduction in profilometry using multi-probe methods
| Project/Area Number |
22560130
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | High Energy Accelerator Research Organization |
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Principal Investigator |
KUME Tatsuya 大学共同利用機関法人高エネルギー加速器研究機構, 機械工学センター, 研究機関講師 (40353362)
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| Project Period (FY) |
2010 – 2012
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| Keywords | 形状測定 / 誤差伝播 / 多点法 / スティッチング / ゼロ点ずれ |
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| Research Abstract |
The estimated errors for the profiles obtained by 2-point method, 3-point method, and stitching agree well with the experimental values and it shows validity for our error estimation. It also shows that the systematic error shown in the measurements by using our profile measurement system adopting zero-adjustment method, which prevents zero difference between the three displacement meters for 3-point method affecting the measurements, can be caused by error in the measurement positions. Furthermore, it was experimentally shown that the fluctuation of the zero difference can be detected and compensated with the stability equal to the resolution of the displacement meters.
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