Surface modification by nano structure self-organized using laser irradiation

2012 Fiscal Year Final Research Report

• Project/Area Number: 22560131
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Kanagawa Industrial Technology Center
• Principal Investigator: KANEKO Satoru 神奈川県産業技術センター (40426359)
• Co-Investigator(Renkei-kenkyūsha): YOSHIMOTO Mamoru (20174998)
• Project Period (FY): 2010 – 2012
• Keywords: ナノ / マイクロ加工

Research Abstract

Establishment of new method to self-organize nano-structure by using scanning CW laser, and evaluation of process to grow the nano-structure. High though-put can be possible with high scanning speed of 300 m/mim. Structural function, such as structural color and water-repellent, were verified on the nano-structure.

Research Products

• [Journal Article] Functional surface on periodical nanostructure self-organised by laser scanning at speed of 300 m/min (2013)
  • Author(s): Satoru Kaneko, Takeshi Ito, Chihiro Kato, Satomi Tanaka, Yousuke Ono, Tokuo Yodo, Hiroyasu Nakata, Akira Matsuno, Takashi Nire, Akifumi Matsuda and Mamoru Yoshimoto
  • Journal Title: Optics and Laser and Engineering Volume: 51 Pages: 294-298
• [Journal Article] Periodic nano trench structure fabricated by high speed scanning CW laser (2012)
  • Author(s): Satoru Kaneko, Takeshi Ito, Manabu Yasui, Chihiro Kato, Satomi Tanaka, Takeshi Ozawa, Yasuo Hirabayashi, Akira Matsuno, Takashi Nireand Mamoru Yoshimoto
  • Journal Title: Laser Applications in Microelectronics and Optoelectronic Manufacturing (LAMIN) Volume: XVI8243 82430U Pages: 82430U-1-7
• [Journal Article] Nano Strip Grating Line Self-Organized by High Speed Scanning CW Laser (2011)
  • Author(s): Satoru Kaneko, Takeshi Ito, Kensuke Akiyama, Satomi Tanaka, Chihiro Kato, Hiroshi Funakubo and Mamoru Yoshimoto
  • Journal Title: Nanotechnology Volume: 22175307 Pages: 175307-1-6
• [Journal Article] Effect of CW Laser Annealing on Silicon Surface for Application of Power Device (2011)
  • Author(s): Satoru Kaneko, Takeshi Ito, Kensuke Akiyama, Manabu Yasui, Chihiro Kato, Satomi Tanaka, Yasuo Hirabayashi, Takeshi Ozawa, Akira Matsuno, Takashi Nire, Hiroshi Funakubo and Mamoru Yoshimoto
  • Journal Title: World Academy of Science, Engineering and Technology Volume: 74 Pages: 1150-1152
• [Journal Article] Effect of Surface on Silicon Substrate Irradiated by Infrared and Ultraviolet CW Lasers (2011)
  • Author(s): Satoru Kaneko, Kensuke Akiyama, Takeshi Ito, Manabu Yasui, Yu Motoizumi, Satomi Tanaka, Chihiro Kato, Yasuo Hirabayashi, Takeshi Ozawa, Akira Matsuno, Takashi Nire and Mamoru Yoshimoto
  • Journal Title: IEEJ Transacton Volume: OQD-11-007 Pages: OQD-11-007-1-4
• [Presentation] Periodical nanostructure grown on trace of CW laser scanning at high speed of 300 m/min. (2012)
  • Author(s): S. Kaneko, T. Ito, M. Yasui, T. Ozawa, Y. Hirabayashi, S. Tanaka, C. Kato, A. Matsuno, T. Nire, H. Nakata, T. Yodo, A. Matsuda, M. Yoshimoto
  • Organizer: XI International Conference on Nanostructured Materials (NANO2012)
  • Place of Presentation: Rhodos Convention Center, Rhodos, Greece
  • Year and Date: 20120826-31
• [Presentation] Periodic nano trench structure fabricated by high speed scanning CW laser (2012)
  • Author(s): Satoru Kaneko, Takeshi Ito, Chihiro Kato, Satomi Tanaka, Akira Matsno, Takashi Nire and Mamoru Yoshimoto
  • Organizer: SPIE, Photonics West 2012
  • Place of Presentation: Moscone Center, San Francisco, CA, U. S. A.
  • Year and Date: 20120121-26
• [Presentation] Structural Function on Nanostructure Self-Organized on Amorphous Si Layer by High Speed Scanning of CW Lasers (2012)
  • Author(s): Satoru Kaneko, Takeshi Ito, Manabu Yasui, Takeshi Ozawa, Yasuo Hirabayashi, Satomi Tanaka, Chihiro Kato, Akira Matsuno, Takashi Nire, Hiroyasu Nakata, Tokuo Yodo, Akifumi Matsuda, Mamoru Yoshimoto
  • Organizer: The 73rd Fall Meeting, 2012, The Japan Society of Applied Physics
  • Place of Presentation: Ehime University, Matsuyama, Ehime, Japan
  • Year and Date: 2012-09-12
• [Presentation] Development of laser annealing system : self-organised nanostructure (2012)
  • Author(s): Satoru Kaneko
  • Organizer: Toyama International Nanotechnology Symposium
  • Place of Presentation: Toyama Convention Center, Toyama, Japan
  • Year and Date: 2012-08-31
• [Presentation] Self-organized Periodic Nanostructure by CW laser with scanning speed of 300 m/min. (2011)
  • Author(s): Satoru Kaneko, Takeshi Ito, Satomi Tanaka, Chihiro Kato Akira Matsuno, Takashi Nire and Mamoru Yoshimoto
  • Organizer: The 72th Fall Meeting, 2010, The Japan Society of Applied Physics
  • Place of Presentation: University of Yamagata, Yamagata, Japan
  • Year and Date: 20110829-0902
• [Presentation] Effect of CW Laser Annealing on Silicon Surface for Application of Power Device (2011)
  • Author(s): Satoru Kaneko, Takeshi Ito, Kensuke Aki yama, Manabu Yasui, Chihiro Kato, Satomi Tanaka, Yasuo Hirabayashi, Takeshi Ozawa, Akira Matsuno, Takashi Nire, Hiroshi Funakubo and Mamoru Yoshimoto
  • Organizer: International Conference on Nanotechnology, Optoelectronics and Photonics (ICNOP2011)
  • Place of Presentation: Penang, Malaysia
  • Year and Date: 20110222-24
• [Presentation] Effect of Surface on Silicon Substrate Irradiated by Infrared and Ultraviolet CW Lasers (2011)
  • Author(s): Satoru Kaneko, Kensuke Akiyama, Takeshi Ito, Manabu Yasui, Yu Motoizumi, Satomi Tanaka, Chi-hiroKato, Yasuo Hirabayashi, Takeshi Ozawa, Akira Matsuno, Takashi Nire and Mamoru Yoshimoto
  • Organizer: IEEJ Workshop
  • Place of Presentation: Toyama, Toyama, Japan
  • Year and Date: 2011-03-05
• [Book] CWレーザーの高速スキャン照射による微細ナノ構造の自己成長 (2012)
  • Author(s): 金子智、吉本護
  • Publisher: 光アライアンス日本工業出版
• [Book] 2波長CWレーザスキャンによるナノ周期構造の形成～表面新機能を発現させる高速プロセス～ (2012)
  • Author(s): 金子智、松野明、吉本護
  • Publisher: レーザ加工学会誌
• [Book] レーザアニール装置開発からPLD法による製膜まで (2012)
  • Author(s): 金子智、岸本幸宏
  • Publisher: レーザ協会会誌
• [Book] 一枚の写真レーザーによる高速表面ナノ加工を利用した「かたちによる着色」 (2011)
  • Author(s): 金子智、吉本護
  • Publisher: 月刊誌 O plus E (Advanced Communication Media CO., LTD)
• [Remarks] 2011年4月27日付け日刊工業新聞一面に掲載"高速アニールレーザーによるナノ微細加工技術" 新聞掲載
• [Remarks] "2波長CWレーザを用いた表面ナノ加工プロセスの開発"エレクトロニクス製品を進化させる光プロセス最新動向多元技術融合光プロセス研究会・(財)光産業技術振興協会平成22年10月20日(東京都・産業技術総合研究所) 招待/依頼講演等
• [Remarks] ``Periodic nanostructure self-organized on trace of CW laser scanning line on silicon substrate" Satoru Kaneko IUMRS-ICEM2012 Sep. 24-28 (25), 2012, Yokohama
• [Remarks] "高速レーザースキャン法によるナノ周期構造の成長"表面技術協会関東支部・エレクトロニクス・表面技術フォーラム平成23年12月9日(神奈川県)
• [Patent(Industrial Property Rights)] 周期構造およびその形成方法 (2011)
  • Inventor(s): 金子智、伊藤健、秋山賢輔、田中聡美、加藤千尋、平林康男、松野明、楡孝
  • Industrial Property Number: 特許出願2011-202149
  • Filing Date: 2011-09-15