2012 Fiscal Year Final Research Report
Applications of carbon nanotube films to contact materials of RF-MEMS switch
| Project/Area Number |
22560142
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Design engineering/Machine functional elements/Tribology
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| Research Institution | Okayama University (2011-2012)
Kobe University (2010) |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
ISONO Yoshimasa 神戸大学, 工学研究科, 教授 (20257819)
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| Project Period (FY) |
2010 – 2012
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| Keywords | RF MEMS / カーボンナノチューブ薄膜 / 接触抵抗 / 凝着力 / 接点電極 |
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| Research Abstract |
Radio-frequency microelectromechanical systems (RF MEMS) switches have potentially superior electrical properties. There are problems with the electrical contacts: The mechanical relay switches in RF MEMS switches are microsized, and so the contact electrodes must be considerably smaller (less than 100 μm2) . In order to solve the problem, we used carbon nanotube (CNT) films as contact materials under micro loads. Although CNT films have high contact resistances, Au film depositions on CNT films and horizontal alignment of CNTs decrease contact resistances.
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