2012 Fiscal Year Final Research Report
Band-gap states and quality analyses of AlGaN/GaN hetero-structures
| Project/Area Number |
22560309
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Electronic materials/Electric materials
|
|---|
| Research Institution | Chubu University |
|---|
Principal Investigator |
|
|---|
| Co-Investigator(Renkei-kenkyūsha) |
IROKAWA Yoshihiro 物質・材料研究機構, 主任研究員 (90394832)
|
|---|
| Project Period (FY) |
2010 – 2012
|
| Keywords | 電気・電子材料 / 窒化物半導体 / 半導体物性 / 結晶工学 |
|---|
| Research Abstract |
In conventional AlGaN/GaN hetero-structures grown by MOCVD, the C impurity incorporation was enhanced with decreasing the growth temperature of the GaN buffer layer between 1120 and 1170℃. Concurrently, deep-level defects became dense at2.07, 2.80, and 3.23eV below the conduction band, presumably attributable to Ga vacancies and shallow C acceptors in the GaN buffer layer. Among them, the 2.80 and 3.23eV levels are found to be strongly responsible for the carrier-trapping phenomena in the AlGaN/GaN hetero-structures.
|
