2011 Fiscal Year Final Research Report
Research on robust and reliable RF-MEMS switch using conductive soft material
| Project/Area Number |
22710119
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | Tohoku University |
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Principal Investigator |
YOSHIDA Shinya 東北大学, 原子分子材料科学高等研究機構, 助教 (30509691)
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| Project Period (FY) |
2010 – 2011
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| Keywords | MEMS / RF-スイッチ / 導電性高分子 |
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| Research Abstract |
In this study, the flexibility and mechanical property of a conductive soft material was evaluated in order to investigate its application possibility to RF-MEMS switch. In addition, process technology for improvement of fracture strength of the single crystal silicon which was damaged by etching process was developed. As a result, Young's modulus of a thin polyaniline film as a conductive polymer measured approximately 5 GPa, and the adhesion force to metals was evaluated to be relatively low. Furthermore, it was demonstrated that hydrogen annealing in appropriate condition can lead to flattening of the asperity of the silicon surface due to etching damage.
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[Journal Article] Redox active polymers with phenothiazine moieties for nanoscale patterning via conductive scanning force microscopy2011
Author(s)
Ali A. Golriz, Tassilo Kaule, Jeannine Heller, Maria B. Untch, Philipp Schattling, Patrick Theato, Masaya Toda, Shinya Yoshida, Takahito Ono, Hans-Jurgen Butt, Jochen Stefan Gutmann and Rudiger Berger
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Journal Title
Nanoscale
Volume: 3(12)
Pages: 5049-5058
Peer Reviewed
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