2011 Fiscal Year Final Research Report
Statistical Process Control for Autocorrelated Processes
| Project/Area Number |
22710151
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Social systems engineering/Safety system
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| Research Institution | Tokyo University of Science |
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Principal Investigator |
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| Project Period (FY) |
2010 – 2011
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| Keywords | 品質管理 / 統計的品質管理 / 統計的工程管理 / 管理図 / 工程能力 / 統計的制御 / 管理特性 / 実験計画法 |
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| Research Abstract |
Traditional statistical process control are applied for processes where data are independent and identically distributed(i. i. d.). Therefore, this research presented statistical process control methods for autocorrelated processes such as semiconductor manufacturing process. Specifically, this research proposed the determination of the adjustment timing on the basis of the process capability, and control charts combining information about the state of statistical control and process capability were also developed for the judgment of adjustment timing. In addition to that, the process rate as control characteristics was presented, and factor assignment for supersaturated designs was proposed
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