2011 Fiscal Year Final Research Report
Fabrication of epitaxially grown functional oxide thin films on flexible polymer substrate.
| Project/Area Number |
22760013
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Applied materials science/Crystal engineering
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| Research Institution | Kinki University |
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Principal Investigator |
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| Project Period (FY) |
2010 – 2011
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| Keywords | エピタキシャル成長 / フレキシブルデバイス |
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| Research Abstract |
The purpose of the study is to clarify the fundamental knowledge and the process procedure for the fabrication of epitaxial functional oxides, i. e., piezoelectric, ferroelectric and so on, onto flexible polymer substrates. Generally, flexible polymer cannot resist the temperature of more than hundreds centigrade, due to the poor heatproof. In order to resolve the problem, the novel process for the flexible epitaxial oxide thin films was proposed. First, high quality oxide thin film is epitaxially grown on Mg0 substrate which is heatproof. Then the sample is glued to flexible polymer substrate. Finally, the Mg0 substrate is completely dissolved by etching process. In this study, basic procedure of the process was established.
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