Development of coherence diffraction imaging for high-harmonic-generation EUV source

2011 Fiscal Year Final Research Report

• Project/Area Number: 22760029
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: University of Hyogo
• Principal Investigator: HARADA Tetsuo 兵庫県立大学, 高度産業科学技術研究所, 助教 (30451636)
• Project Period (FY): 2010 – 2011
• Keywords: 応用光学 / EUV / 高次高調波 / コヒーレンス / コヒーレント回折イメージング

Research Abstract

Image reconstruction method for a lensless microscope was developed to observe EUV-mask patterns. The microscope equipped with standalone EUV source of high harmonic generation, which temporal coherence was not enough to reconstruct the pattern image. To improve the coherence, we fabricated a grating for a monochromator.

Research Products

• [Journal Article] Development of Coherent Extreme-Ultraviolet Scatterometry Microscope with High-Order Harmonic Generation Source for Extreme-Ultraviolet Mask Inspection and Metrology (2012)
  • Author(s): Masato Nakasuji, Akifumi Tokimasa, Tetsuo Harada, Yutaka Nagata, Takeo Watanabe, Katsumi Midorikawa, Hiroo Kinoshita
  • Journal Title: Jpn. J. Appl. Phys Volume: 52(in press)
  • Peer Reviewed
• [Journal Article] Imaging of EUV-mask patterns using coherent EUV scatterometry microscope based on coherent diffraction imaging (2011)
  • Author(s): Tetsuo Harada, Masato Nakasuji, Teruhiko, Kimura, Takeo Watanabe, Hiroo Kinoshita, Yutaka Nagata
  • Journal Title: J. Vac. Sci. Technol. B Volume: 29
  • DOI: DOI:10.1116/1.3657525
  • Peer Reviewed
• [Journal Article] Critical Dimension Measurement of an Extreme-Ultraviolet Mask Utilizing Coherent Extreme-Ultraviolet Scatterometry Microscope at NewSUBARU (2011)
  • Author(s): Tetsuo Harada, Masato Nakasuji, Masaki Tada, Yutaka Nagata, Takeo Watanabe, and Hiroo Kinoshita
  • Journal Title: Jpn. J. Appl. Phys Volume: 50
  • DOI: DOI:10.1143/JJAP.50.06GB03
  • Peer Reviewed
• [Presentation] Development of Standalone Coherent EUV Scatterometry Microscope with High-Harmonic-Generation EUV Source (2012)
  • Author(s): Tetsuo Harada, Masato Nakasuji, Takeo Watanabe, Hiroo Kinoshita
  • Organizer: Photo Mask Japan 2012
  • Place of Presentation: (Yokohama, Japan)(招待講演)
  • Year and Date: 2012-04-19
• [Presentation] コヒーレントスキャトロメトリー顕微鏡によるEUVマスク検査 (2011)
  • Author(s): 原田哲男, 中筋正人, 渡邊健夫, 永田豊, 木下博雄
  • Organizer: 第11回X線結像光学シンポジウム
  • Place of Presentation: (東北大学)(招待講演)
  • Year and Date: 2011-11-04