2011 Fiscal Year Final Research Report

A study on of the high-aspect-ratio hole drilling process by the laser illumination

Research Project

Project/Area Number	22760094
Research Category	Grant-in-Aid for Young Scientists (B)
Allocation Type	Single-year Grants
Research Field	Production engineering/Processing studies
Research Institution	Chiba University
Principal Investigator	HIDAI Hirofumi 千葉大学, 大学院・工学研究科, 准教授 (60313334)
Project Period (FY)	2010 – 2011
Keywords	特殊加工
Research Abstract	We have been reported that drilling a hole with the aspect ratio of >190 and the diameter of -8um in borosilicate glass was achieved by the fourth harmonics Nd : YVO4 laser illumination. In this project, I report the results of beam profile measurement in the hole to control the hole diameter and reveal the drilling process. Beam profiles that passed through holes were measured with a beam profiler and by knife edge scanning method. As a result, beam profile in the hole was constant regardless of the depth, and the intensity distribution was similar to a Gaussian distribution. The laser plasma was observed with a high-speed camera. As a result, it is found that the generation duration of the laser plasma was 20ns. And, the laser plasma was restricted by the inside wall of the hole.

(4 results)