2011 Fiscal Year Final Research Report
A study on of the high-aspect-ratio hole drilling process by the laser illumination
| Project/Area Number |
22760094
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Chiba University |
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Principal Investigator |
HIDAI Hirofumi 千葉大学, 大学院・工学研究科, 准教授 (60313334)
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| Project Period (FY) |
2010 – 2011
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| Keywords | 特殊加工 |
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| Research Abstract |
We have been reported that drilling a hole with the aspect ratio of >190 and the diameter of -8um in borosilicate glass was achieved by the fourth harmonics Nd : YVO4 laser illumination. In this project, I report the results of beam profile measurement in the hole to control the hole diameter and reveal the drilling process. Beam profiles that passed through holes were measured with a beam profiler and by knife edge scanning method. As a result, beam profile in the hole was constant regardless of the depth, and the intensity distribution was similar to a Gaussian distribution.
The laser plasma was observed with a high-speed camera. As a result, it is found that the generation duration of the laser plasma was 20ns. And, the laser plasma was restricted by the inside wall of the hole.
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