2012 Fiscal Year Final Research Report

Development of a micro probe unit for motion error measurement using three-point method and proof of an algorithm for reducing zero-adjustment error

Research Project

Project/Area Number	22760099
Research Category	Grant-in-Aid for Young Scientists (B)
Allocation Type	Single-year Grants
Research Field	Production engineering/Processing studies
Research Institution	Kyushu Institute of Technology
Principal Investigator	SHIMIZU Hiroki 九州工業大学, 大学院・工学研究院, 准教授 (50323043)
Research Collaborator	TAMARU Yuuma 九州工業大学, 大学院・工学研究院, 助教 (30284590) BABA Akiyoshi 九州工業大学, マイクロ化総合技術センター, 准教授 (80304872) TAKEUCHI Shuuzou 北九州学術推進機構(FAIS), 半導体技術センター, 主任研究員
Project Period (FY)	2010 – 2012
Keywords	精密位置決め / 加工計測
Research Abstract	A MEMS displacement sensor unit for measuring motion errors of stage using three-point method has been proposed. This monolithic sensor with three cantilevers can detect displacement of three points simultaneously. The manufacturing process was divided into three sub-processes: tip fabrication, fabrication of piezo resistor for displacement detection, perforation of outer shape. Suitable condition of each sub process was determined by trial processing experiments. Furthermore, total process for manufacturingthe proposed device was redesigned based on these experiments. In addition, a code for processing data with the three point method was programmed and simulations were carried out to calculate the affects of alignment errors of the sensors.