2012 Fiscal Year Final Research Report
Evaluation of ZnO single crystal/thin film by precise ultrasonic measurements
| Project/Area Number |
22760223
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | Tohoku University |
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Principal Investigator |
OHASHI Yuji 東北大学, 大学院・工学研究科, 助教 (50396462)
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| Project Period (FY) |
2010 – 2012
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| Keywords | 超音波計測 / 酸化亜鉛単結晶 / 酸化亜鉛薄膜 / 抵抗率評価 |
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| Research Abstract |
A foundation of evaluation method for bulk single crystal and thin film of zinc oxide was developed using a precise ultrasonic measurement technology. A technique for evaluating thin films was developed based on results of bulk single crystals with accurate acoustical physical constants used as standard specimens. Also, a technique of determining resistivities by measuring phase velocities and propagation attenuations of two ultrasonic wave modes concerning only one resistivity and both of two resistivities was investigated to evaluate the resistivity of the zinc oxide in consideration of anisotropy.
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