2012 Fiscal Year Final Research Report
Development of Polyatomic Ion Source for Organic Liquids toward Application of Shallow Ion Implantation
| Project/Area Number |
22760252
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Kyoto University |
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Principal Investigator |
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| Project Period (FY) |
2010 – 2012
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| Keywords | 微細プロセス技術 |
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| Research Abstract |
Field emission type ionic liquid ion source with a high and stable current was developed and evaluated on its beam properties. Effects of the ionic liquid ion beams on silicon and glass substrates were also studied. The developed ion source produced single anions and anion with anion-cation pairs in positive ion beam, and yielded single cations and cation with anion-cation pairs in negative ion beam. Glass substrates irradiated with ionic liquid BMIM-PF6 ion beam showed decrease of surface roughness to 0.1 nm. This indicates that the ionic liquid ion beams can be used for surface modifications.
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