2011 Fiscal Year Final Research Report
Ceramics Coating of Metal Substrate by Chemical Vapor Deposition under Intense Laser Field
Project/Area Number |
22760550
|
Research Category |
Grant-in-Aid for Young Scientists (B)
|
Allocation Type | Single-year Grants |
Research Field |
Material processing/treatments
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Research Institution | Tohoku University |
Principal Investigator |
ITO Akihiko 東北大学, 金属材料研究所, 助教 (20451635)
|
Project Period (FY) |
2010 – 2011
|
Keywords | 化学気相析出 / レーザー工学 / セラミックス / コーティング / 配向制御 |
Research Abstract |
A laser irradiation to chemical vapor deposition process enhanced chemical reactions and mobility of adsorbed species on a surface, leading a high-speed deposition of ceramics coating with orientation and microstructure control. In the present study, we demonstrated the preparation of α-Al_2O_3, TiON and TiN films at high deposition rate with orientation, composition and microstructural control.
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Research Products
(71 results)