2012 Fiscal Year Final Research Report
Development of Nano-scale structure design and process technology by advanced composite cluster beam
| Project/Area Number |
22760557
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Material processing/treatments
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| Research Institution | Kyoto University |
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Principal Investigator |
SEKI Toshio 京都大学, 大学院・工学研究科, 講師 (00402975)
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| Project Period (FY) |
2010 – 2012
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| Keywords | クラスター / 量子ビーム科学 / ナノプロセス |
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| Research Abstract |
Composite cluster beam generation apparatus was constructed and clusters composed with Ar gas and liquid materials, such as methanol, water or α-trichloroethane, were formed. When a Si target was irradiated with the CH3OH-Ar composite cluster ion beam, the intensity of secondary ions from the Si by composite cluster ion was 10 times higher than that by Ar cluster ion. This result shows that the CH3OH-Ar composite cluster ion beam is useful as probe beam of secondary ion mass spectroscopy.
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