2011 Fiscal Year Final Research Report
Microsphere resonator based micro-probe for 3-dimensional coordinate metrology
| Project/Area Number |
22860034
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| Research Category |
Grant-in-Aid for Research Activity Start-up
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Osaka University |
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Principal Investigator |
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| Project Period (FY) |
2010 – 2011
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| Keywords | 微小球共振 / NSOM / マイクロプローブ / 光カップリング |
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| Research Abstract |
In order to measure the objective in size below a few millimeters, the nano-coordinate measuring machine(CMM) is highly required. Since the surface sensing probe is a key device for the nano-CMM, we proposed a new probe principle based on the whispering gallery mode(WGM) resonance. For the fundamental experiments, the equipments to generate WGMs with either a prism surface of a tapered optical fiber were developed. Beside, the equipment to evaluate the surface sensing resolution of the WGM probe was developed.
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