2011 Fiscal Year Final Research Report
Establishment of Basic Fabrication Techniques for Interdisciplinary Electoro-mechanical Systems with Ionic Conductive Polymer Actuators
Project/Area Number |
22860037
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Research Category |
Grant-in-Aid for Research Activity Start-up
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Allocation Type | Single-year Grants |
Research Field |
Intelligent mechanics/Mechanical systems
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Research Institution | Wakayama University |
Principal Investigator |
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Project Period (FY) |
2010 – 2011
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Keywords | 高分子アクチュエータ / イオン導電性高分子 / マイクロマシン / 無電解めっき |
Research Abstract |
In this research, we have developed a basic fabrication techniques for interdisciplinary electoro-mechanical Systems(MEMS) with ionic polymer conductive polymer actuators. Ionic polymer-metal composite(IPMC) is used as an ionic polymer conductive polymer actuator. In order to confirm the efficiencies of our developed techniques, a prototype of an IPMC of cantilever-type was fabricated on the silicon substrate by using them.
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