Development of a correction method for high-frequency vibration measurement errors caused by contact stiffness

2023 Fiscal Year Final Research Report

• Project/Area Number: 22K14273
• Research Category: Grant-in-Aid for Early-Career Scientists
• Allocation Type: Multi-year Fund
• Review Section: Basic Section 21030:Measurement engineering-related
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: Shimoda Tomofumi 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員 (60880763)
• Project Period (FY): 2022-04-01 – 2024-03-31
• Keywords: 加速度センサ / 振動計測 / 接触剛性 / レーザー干渉計 / 計量標準

Outline of Final Research Achievements

In this research, the effect of contact stiffness on accelerometer sensitivity in high-frequency vibration measurements was studied. First, a dynamical model of an accelerometer was developed to explain the mechanism by which contact stiffness affects the frequency characteristics of accelerometer sensitivity. The validity of the model was confirmed through experiments. The experimental results also showed that the frequency characteristics of the sensitivity change depending on the measurement target. By comparing the measured characteristics with the dynamical model, the contact stiffness was quantitatively estimated, and its dependence on the Young’s modulus of the target was determined. Furthermore, we have gained insights into improving vibration measurement accuracy by estimating and correcting the accelerometer’s sensitivity based on the obtained dependency.

Free Research Field

計測工学

Academic Significance and Societal Importance of the Research Achievements

本研究で得られた知見は、高周波振動計測の精度を制限する主要因のひとつである接触剛性について、定性的・定量的な両面で理解を深めたものである。特に定量的な面は先行研究で十分に評価されておらず、評価方法も含めて本研究が新たに提案・実証したことで、加速度センサ感度の補正を可能にする展望を拓いた。これにより近年産業ニーズが高まりつつある高周波振動計測の精度向上に役立てられるほか、関連する計量標準の整備にも貢献できると期待される。