2022 Fiscal Year Annual Research Report
Atomic structure elucidation and modulation for Al2O3/diamond interface
| Project/Area Number |
22K14287
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| Research Institution | Kanazawa University |
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Principal Investigator |
張 旭芳 金沢大学, ナノマテリアル研究所, 特任助教 (30857404)
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| Project Period (FY) |
2022-04-01 – 2023-03-31
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| Keywords | diamond / Al2O3 / interface |
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| Outline of Annual Research Achievements |
We focused on the Al2O3/diamond interface by modulating the pre-wet treatment times before the ALD process. We found that the sample without wet annealing treatment shows large Dit, in the order of 1012~1013 cm－2eV－1. Dit is reduced by one order of magnitude lower when wet annealing treatments were performed. Dit has no significant change with increasing wet annealing treatments. The sample with annealing for 3h shows lower Dit in the relatively deep energy position.
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