Development of advanced film microstructure control methods by elucidating on-substrate material behaviour in planetary spin coaters.

2023 Fiscal Year Final Research Report

• Project/Area Number: 22K14515
• Research Category: Grant-in-Aid for Early-Career Scientists
• Allocation Type: Multi-year Fund
• Review Section: Basic Section 26050:Material processing and microstructure control-related
• Research Institution: Oita National College of Technology
• Principal Investigator: TOKUMARU KAZUKI 大分工業高等専門学校, 機械工学科, 助教 (80909523)
• Project Period (FY): 2022-04-01 – 2024-03-31
• Keywords: スピンコート / セラミックス / 薄膜 / 高粘度流体 / 粒子配向

Outline of Final Research Achievements

In this study, a planetary spin-coating method was used to form a thin film, which successfully reduced uneven film thickness after film formation and controlled orientation using plate-like particles, which had been a problem in conventional spin-coating. In conventional spin-coating, the film is spread on the substrate by steady centrifugal force, which inevitably results in a raised centre and radial irregularities, but with the planetary method, both film irregularities can be eliminated by time variation of centrifugal force on the substrate.
In addition, the orientation of the plate particles allows the film structure to be oriented in a uniform direction, which is expected for the thermal and electrical properties of the resulting films.

Free Research Field

材料加工

Academic Significance and Societal Importance of the Research Achievements

本研究の学術的意義は、高速度カメラを用いた材料挙動の観察により、膜厚ムラの改善する仕組みをある程度把握できたところであると考えられる。これにより、当初のターゲットであった無機材料だけでなく、高分子材料などの多くの製膜の膜厚ムラの改善に効果的であることが期待できる。
また、社会的意義として、膜厚ムラ低減による性能の均質化とともに、板状粒子の配向による熱・電気的特性の向上が期待でき、将来的に電池材料や圧電材料などの各種素子の性能改善に寄与できると考えている。