Measurement and modeling of surface reaction of reactive species in surface treatment using atmospheric pressure plasma

2023 Fiscal Year Final Research Report

• Project/Area Number: 22K18789
• Research Category: Grant-in-Aid for Challenging Research (Exploratory)
• Allocation Type: Multi-year Fund
• Review Section: Medium-sized Section 21:Electrical and electronic engineering and related fields
• Research Institution: The University of Tokyo
• Principal Investigator: Ono Ryo 東京大学, 大学院新領域創成科学研究科, 教授 (90323443)
• Project Period (FY): 2022-06-30 – 2024-03-31
• Keywords: 活性種 / 大気圧プラズマ / 表面処理 / ポリマー / 表面反応

Outline of Final Research Achievements

In this study, we quantitatively measured the surface reaction of reactive species on polypropylene surfaces using vacuum ultraviolet photodissociative reactive species supply (VUV PRS) method, an original technique to selectively deliver reactive species such as OH and O, which are important in material surface treatment using atmospheric-pressure plasma. We succeeded in quantitatively measuring the rates of surface reactions of OH and O. The results also indicated the existence of a reaction in the reverse direction, where the reaction saturates or the surface modification degenerates due to an excessive supply of reactive species. Based on the results of this measurement, a simulation model of the surface reaction of reactive species was developed with the aid of quantum chemical calculations and molecular dynamics calculations.

Free Research Field

プラズマ工学

Academic Significance and Societal Importance of the Research Achievements

大気圧プラズマによる材料表面処理は、産業界で広く使われている。これら表面処理では活性種の表面反応が最も重要だが、その計測は困難でこれまで例がなかった。本研究では独自の技術を用いてこの計測を可能とし、ポリマー表面のOおよびOHの反応を計測した。また、この計測結果に基づく表面反応モデルの構築も行った。これまで経験則に頼らざるを得なかった大気圧プラズマ表面処理に、計測および反応モデルを導入した本研究の意義は大きい。また、大気圧プラズマは液面や生体への照射も行われており、本研究手法は将来的にこれらの表面反応解明にもつながる点でも意義は大きい。