2023 Fiscal Year Annual Research Report
自己相似解で必要なプラズマ初期状態の電子密度・温度・速度場の時間・空間分解計測
| Project/Area Number |
22KJ2443
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| Allocation Type | Multi-year Fund |
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| Research Institution | Hokkaido University |
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Principal Investigator |
PAN Yiming 北海道大学, 工学研究院, 特別研究員(PD)
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| Project Period (FY) |
2023-03-08 – 2024-03-31
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| Keywords | EUV light source / Laser plasma / Thomson scattering |
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| Outline of Annual Research Achievements |
For the two years contrast, I investigated the laser produced plasma (LPP) behaviors using collective Thomson scattering (CTS) with temporal and spatial resolution of 2 ns and 50μm, respectively, at the time during the drive laser irradiation. YAG laser at 1 μm wavelength is serving as the drive laser. In the first year Carbon-LPP was measured, and the isothermal expansion of the LPP was first confirmed experimentally. In this second year Tin is mainly investigated for it is responsible for emitting narrow-band extreme ultraviolet (EUV) light at 13.5 nm wavelength for nanolithography. The electron density and temperature of Sn LPP was shown in detail when it radiates EUV light, which information has long been wanted by the EUV community.
Furthermore, the corresponding EUV spectra irradiated by Sn LPP near 13.5 nm were also be measured simultaneously using a grazing incidence spectroscopy (GIS). This system can provide spatial-resolved EUV spectra in the target-normal direction.
The results from GIS, along with the measured density/temperature, could answer the core question for atomic physics: ions at what temperature and density radiate what spectra. In addition, my experiment enables the first experimental validation of an existing atomic model, JATOM.
Looking farther, this noval approach can provide a valuable experimental benchmark for existing atomic models, assisting the refinement of more accurate and predictive models in the future.
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