Development of laser-assisted micro removal processing tool controlled by the spatial light field allowing nanoscale correction for 3-D micro objects

2014 Fiscal Year Final Research Report

• Project/Area Number: 23246028
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: The University of Tokyo
• Principal Investigator: TAKAHASHI Satoru 東京大学, 先端科学技術研究センター, 教授 (30283724)
• Co-Investigator(Kenkyū-buntansha): TAKAMASU Kiyoshi 東京大学, 大学院工学系研究科, 教授 (70154896)
• Project Period (FY): 2011-04-01 – 2015-03-31
• Keywords: 超精密加工 / ナノ修正加工 / ソフトマテリアル

Outline of Final Research Achievements

We proposed a new laser-assisted material-removal processing concept, yielding a potential nanoscale correction process for next-generation functional structured soft material such as nanostructured photoresist surfaces and micro 3-D objects fabricated using microstereolithography, which has been required in the nano production engineering. Theoretical analyses suggested the use of TiO2 photocatalyst nanoparticles trapped by a remotely controlled radiation force, which allows not only remote processing based on an inherent property of light energy, but also fine process resolution beyond the focusing diffraction limit. Experimental analyses verified that the proposed method can provide fine process resolution with the lateral resolution beyond the diffraction limit and with the depth resolution less than 10 nm.

Free Research Field

機械工学，生産工学・加工学