2013 Fiscal Year Final Research Report
Development of a novel micro-column using the multi-gated field emitter for SEM application
| Project/Area Number |
23246065
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Shizuoka University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
NEO Yoichiro 静岡大学, 電子工学研究所, 准教授 (50312674)
NAGAO Masayoshi 独立行政法人産業技術総合研究所, 研究員 (80357607)
YOSHIDA Tomoya 独立行政法人産業技術総合研究所, 研究員 (80462844)
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Keywords | 多段ゲート微小電子源 / マイクロカラム / 電子ビーム / ビーム収束 / 収差 / 電子銃 / 静電レンズ |
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| Research Abstract |
We have developed a novel micro-column using the multi-gated field emitter for scanning electron microscope (SEM) application. We designed and fabricated the micro-column, and measured the electron beam characteristics of the micro-column. We have successfully developed the novel micro-column as we designed. However, for the SEM application, the beam size emitted from the micro-column is still not sufficient. Reducing the initial beam angle from the micro-column is necessary. We considered to incorporate a welt electrode with the micro-column, and investigated the effect of the welt electrode. As a result, we have concluded that we can realize a multi-gated field emitter micro-column for SEM application by incorporating a welt electrode with the micro-column.
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Research Products
(14 results)
