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2013 Fiscal Year Final Research Report

Damage-free etching of organic materials with mesoscopic cluster beams

Research Project

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Project/Area Number 23310080
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionUniversity of Hyogo

Principal Investigator

TOYODA Noriaki  兵庫県立大学, 工学(系)研究科(研究院), 准教授 (00382276)

Project Period (FY) 2011-04-01 – 2014-03-31
Keywordsクラスター / 有機材料 / ナノ加工 / ダメージフリー
Research Abstract

Damage-free processing of organic materials with mesoscopic cluster ion beam was developed using pickup cell and by controlling charge state, cluster-size, and environment gas during irradiations. An in-situ XPS system connected to cluster ion beam system was used for damage evaluation of organic materials. It has been clarified that low-ionization voltage is required to suppress formation of multiply charged cluster ions. Besides, large cluster ions, and control of environment gas during irradiation is effective for low-damage processing of organic materials.

  • Research Products

    (27 results)

All 2013 2012 2011

All Journal Article (9 results) (of which Peer Reviewed: 8 results) Presentation (18 results) (of which Invited: 4 results)

  • [Journal Article] Evaluation of charge state of gas cluster ions by means of individual crater observations2013

    • Author(s)
      N. Toyoda, I. Yamada
    • Journal Title

      Nuclear Instruments and Methods in Physics Research, Section B

      Volume: 307 Pages: 269-272

    • Peer Reviewed
  • [Journal Article] Gas cluster ion beam etching under acetic acid vapor for etch-resistant material2013

    • Author(s)
      A. Yamaguchi, R. Hinoura, N. Toyoda, K. Hara, I. Yamada
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Pages: 05EB05

    • Peer Reviewed
  • [Journal Article] Magnetic properties of Fe7Co3 films with gas clusterion beam irradiations2013

    • Author(s)
      N. Toyoda, A. Fujimoto, I. Yamada
    • Journal Title

      Journal of applied physics

      Volume: 113 Pages: 17A328

    • Peer Reviewed
  • [Journal Article] Surface morphology and sputtering yield of SiO2 withoblique-incidence gas cluster ion beam2013

    • Author(s)
      K. Sumie, N. Toyoda, I. Yamada
    • Journal Title

      Nuclear Instruments and Methods in Physics Research, Section B

      Volume: 52 Pages: 290-293

    • Peer Reviewed
  • [Journal Article] Irradiation effects of gas cluster ion beamson co-fe films2013

    • Author(s)
      N. Toyoda, A. Fujimoto, I. Yamada
    • Journal Title

      Japanese journal of applied physics

      Volume: 52 Pages: 06GF01

    • Peer Reviewed
  • [Journal Article] Reduction of irradiation damage using size-controlled nitrogen gas cluster ion beams2012

    • Author(s)
      N. Toyoda, and I. Yamada
    • Journal Title

      Nuclear Instruments & Methods in Physics Research Section B

      Volume: 273 Pages: 11-14

    • Peer Reviewed
  • [Journal Article] Development of Cu Etching Using O2 Cluster Ion Beam under Acetic Acid Gas Atmosphere2012

    • Author(s)
      T. Suda, N. Toyoda, K. Hara, I. Yamada
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Pages: 08HA02-1-5

    • Peer Reviewed
  • [Journal Article] Metal etching with reactive gas cluster ion beams using pickup cell2012

    • Author(s)
      N. Toyoda, I. Yamada
    • Journal Title

      AIP conference proceedings

      Volume: 1496 Pages: 288-291

    • Peer Reviewed
  • [Journal Article] Gas cluster ion beam technology for nano-fabrication2012

    • Author(s)
      N. Toyoda, I. Yamada
    • Journal Title

      Advances in Science and Technology

      Volume: 82 Pages: 1-8

  • [Presentation] TEM study ofirradiation effects of GCIB2013

    • Author(s)
      N. Toyoda, A. Yamaguchi, A. Fujimoto, R. Hinoura and I. Yamada
    • Organizer
      第23回日本MRS年次大会
    • Place of Presentation
      横浜(神奈川)
    • Year and Date
      2013-12-09
  • [Presentation] Ripple formations by gas cluster ions inambient reactive gas2013

    • Author(s)
      N. Toyoda, K. Sumie, A. Kimura, I. Yamada
    • Organizer
      2013 JSAP-MRSジョイントシンポジウム
    • Place of Presentation
      同志社大学(京都)
    • Year and Date
      2013-09-20
  • [Presentation] ガスクラスターイオンビーム照射によるされた DLC膜の表面の構造改質2013

    • Author(s)
      藤本昌宏、豊田紀章、山田公
    • Organizer
      2013応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学(京都)
    • Year and Date
      2013-09-19
  • [Presentation] GCIB照射によるメディア保護膜の表面平坦化効果2013

    • Author(s)
      木村旭、富田淳、豊田紀章、谷弘詞、山田公
    • Place of Presentation
      同志社大学(京都)
    • Year and Date
      2013-09-19
  • [Presentation] Low-damage and high-rate sputtering of organic materials with GCIB under H2O vapor environment2013

    • Author(s)
      N. Toyoda, I. Yamada
    • Organizer
      Surface modification of materials by ionbeams 2013
    • Place of Presentation
      クシャダシ(トルコ)
    • Year and Date
      2013-09-18
  • [Presentation] In-situ XPS study of GCIB etching for materialsused in STT-MRAM2013

    • Author(s)
      R. Hinoura, N. Toyoda, I. Yamada
    • Organizer
      ドライプロセスシンポジウム 2013
    • Place of Presentation
      済州島(韓国)
    • Year and Date
      2013-08-30
  • [Presentation] Nano-scale surface modification and ion induced reactions withgas cluster ion beams2013

    • Author(s)
      N. Toyoda, I. Yamada
    • Organizer
      2013春季ヨーロッパ材料学会(E-MRS)
    • Place of Presentation
      ストラスブール(フランス)
    • Year and Date
      2013-05-28
    • Invited
  • [Presentation] ガスクラスターイオンビームによる磁気トンネル接合素子下の平坦化2013

    • Author(s)
      山口明良、日野浦諒、豊田紀章、原謙一、山田公
    • Organizer
      2013応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2013-03-29
  • [Presentation] ガスクラスターイオンビームによる磁性膜の低損傷加工2013

    • Author(s)
      藤本昌宏、木村旭、豊田紀章、山田
    • Organizer
      2013応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2013-03-29
  • [Presentation] ガスクラスターイオンビームエッチング後の MRAM材料の表面状態評価2013

    • Author(s)
      日野浦諒、山口明良、豊田紀章、原謙一、山田公
    • Organizer
      2013応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2013-03-29
  • [Presentation] Etching of FeCo films with gas cluster ion beams and their magnetic properties2013

    • Author(s)
      N. Toyoda
    • Organizer
      12th Joint MMM-IntermagConference 2013
    • Place of Presentation
      シカゴ(米国)
    • Year and Date
      2013-01-15
  • [Presentation] Nano-scale Surface Modification and Ion Induced Chemical Reactions with Gas Cluster Ion Beams2012

    • Author(s)
      N. Toyoda
    • Organizer
      2nd annual world congress of nano-science and technology
    • Place of Presentation
      青島(中国)
    • Year and Date
      2012-10-28
    • Invited
  • [Presentation] Gas cluster ion beam etching of metals with pick-up cell2012

    • Author(s)
      N. Toyoda and I. Yamada
    • Organizer
      19th international conference on ionimplantation technology
    • Place of Presentation
      ヴァリャドリード(スペイン)
    • Year and Date
      2012-06-25
  • [Presentation] Gas cluster ion beam technology for nanofabrication2012

    • Author(s)
      N. Toyoda and I. Yamada
    • Organizer
      4th international conference smart materials,structures and systems
    • Place of Presentation
      モンテカッティーニテルメ(イタリア)
    • Year and Date
      2012-06-11
    • Invited
  • [Presentation] What is the key parameter of electron ionization on crater formations on solid surface ?2011

    • Author(s)
      N. Toyoda, T. Furuya and I. Yamada
    • Organizer
      11th Workshop on Cluster Ion Beam Technology
    • Place of Presentation
      京都大学品川オフィス(東京都)
    • Year and Date
      2011-12-05
  • [Presentation] 雰囲気ガス中 GCIB照射された有機材料の XPSによる評価2011

    • Author(s)
      中桐基裕、豊田紀章、山田公
    • Organizer
      2011年秋季応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-08-30
  • [Presentation] Surface modification and interaction with gas cluster ion beams2011

    • Author(s)
      N. Toyoda and I. Yamada
    • Organizer
      20th International Conference onIon Beam Analysis
    • Place of Presentation
      イタペマ(ブラジル)
    • Year and Date
      2011-04-15
    • Invited
  • [Presentation] GCIB照射損傷のクラスターサイズ依存性の In-situXPSによる評価2011

    • Author(s)
      中桐基裕、豊田紀章、山田公
    • Organizer
      2012年春季応用物理学会学術講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2011-03-17

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Published: 2015-06-25  

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