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2013 Fiscal Year Final Research Report

Study on the mechanism of the sputtering deposition process and preparation of the new functional thin films

Research Project

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Project/Area Number 23340181
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionSasebo National College of Technology

Principal Investigator

KAWASAKI Hiroharu  佐世保工業高等専門学校, 電気電子工学科, 教授 (10253494)

Co-Investigator(Renkei-kenkyūsha) OHSHIMA Tamiko  佐世保工業高等専門学校, 電気電子工学科, 准教授 (00370049)
YAGYU Yoshihito  佐世保工業高等専門学校, 電気電子工学科, 准教授 (40435483)
SUDA Yoshiaki  佐世保工業高等専門学校, 電気電子工学科, 教授 (20124141)
IHARA Takeshi  佐世保工業高等専門学校, 電気電子工学科, 助教 (30634050)
Project Period (FY) 2011 – 2013
Keywordsスパッタリング / 粉体ターゲット
Research Abstract

Functional thin films were prepared using sputtering deposition with powder target. Their deposition processes were also studied by Langmuir probe method, light emission spectroscopic method and laser light scattering method. Experimental results suggest that film quality using powder target were almost same compared with that using bulk target. However, deposition rate using powder target were 2~5 times higher than that using bulk target. Electron density and Ti emission intensity of the sputtering deposition methods were also 2~5 times higher than that using bulk target. The high electron density using powder target may be due to the 4 reasons as follows. 1)Net surface area of the target is larger than that of the bulk target. 2) Oblique incidence of sputtering ions into the target. 3)Surface temperature of the powder target is higher than that of the bulk target. 4)Hollow cathode effects in the target.

  • Research Products

    (16 results)

All 2014 2013

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (13 results)

  • [Journal Article]2013

    • Author(s)
      Hiroharu KAWASAKI, Tamiko OHSHIMA, Takeshi IHARA, Kento ARAFUNE, Daichi TANIYAMA, Yoshihito YAGYU and Yoshiaki SUDA
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 52 Pages: 11NB07

    • Peer Reviewed
  • [Journal Article]2013

    • Author(s)
      Hiroharu Kawasaki, Daichi Taniyama, Tamiko Ohshima, Takeshi Ihara, Yoshihito Yagyu and Yoshiaki Suda
    • Journal Title

      Trans. Mat. Res. Soc. Japan

      Volume: 38(1) Pages: 69-72

    • Peer Reviewed
  • [Journal Article]2013

    • Author(s)
      Fumiaki Mitsugi, Jin Furukawa, Tamiko Ohshima, Hiroharu Kawasaki, Toshiyuki Kawasaki, Shin-ichi Aoqui and Henryka D. Stryczewska
    • Journal Title

      Eur. Phys. J. Appl. Phys.

      Volume: 61 Pages: 24308

    • Peer Reviewed
  • [Presentation] Effect of Atmospheric Pressure Dielectric Barrier Discharge Plasma2014

    • Author(s)
      Y. Yagyu, N. Matsumoto, N. Hayashi, T. Yamasaki, H. Kawasaki, T. Ohshima, T. Ihara and Y. Suda
    • Organizer
      Inactivation of Penicillium digitatum Spore on Citrus unshiu ICRP-8SPP-31
    • Place of Presentation
      福岡
    • Year and Date
      20140204-07
  • [Presentation] 粉体ターゲットスパッタプロセスの高速度成膜機構解明2014

    • Author(s)
      川崎仁晴,大島多美子,柳生義人,猪原武士,田中雪,須田義昭
    • Organizer
      応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2014-03-18
  • [Presentation] Fungicidal effect of atmospheric pressure dielectric barrier discharge (APDBD)2014

    • Author(s)
      Y. Yagyu, N. Matsumoto, N. Hayashi, T. Yamasaki, H. Kawasaki, T. Ohshima, T. Ihara and Y. Suda
    • Organizer
      Penicillium digitatum spore on citrus ISPlasma2014/IC-PLANTS2014
    • Place of Presentation
      名城大学
    • Year and Date
      2014-03-03
  • [Presentation] Effect of the ultra-violet LED light for characteristic gliding arc discharge2014

    • Author(s)
      Hiroharu Kawasaki, Shinichi Aoqui, Fumiaki Mitsugi, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Yoshiaki Suda
    • Organizer
      ISPlasma2014/IC-PLANTS2014
    • Place of Presentation
      名城大学
    • Year and Date
      2014-03-03
  • [Presentation] Effect of atmospheric pressure dielectric barrier discharge irradiation to green mold spore2013

    • Author(s)
      Y. Yagyu, N. Matsumoto, N. Hayashi, T. Yamasaki, H. Kawasaki, T. Ohshima, T. Ihara and Y. Suda
    • Organizer
      Penicillium digitatum, attached on citrus peel, MRSJ
    • Place of Presentation
      横浜開港記念館
    • Year and Date
      20131209-11
  • [Presentation] Study on the Processes of Thin Films using Powder Target by Pulsed Laser Deposition Method2013

    • Author(s)
      Yoshiaki SUDA, Hiroharu KAWASAKI, Satoshi TAKEICHI, Daichi TANIYAMA, Tamiko OHSHIMA, Yuki TANAKA, Yoshihito YAGYU, Takeshi IHARA
    • Organizer
      The 35th International Symposium on Dry Process(DPS2013)
    • Place of Presentation
      Ramada Plaza Hotel, Korea
    • Year and Date
      20130829-31
  • [Presentation] 有機金属溶液を用いて作製したナノ微粒子に関する研究、Research on production of the nanoparticles using organometallic solution2013

    • Author(s)
      川崎仁晴,大島多美子,田中涼太,柳生義人,猪原武士,須田義昭
    • Organizer
      ナノ学会第11回大会
    • Place of Presentation
      東京工業大学
    • Year and Date
      20130606-06
  • [Presentation] Langmuir probe measurement for sputtering process using metal base powder target2013

    • Author(s)
      Hiroharu Kawasaki, Tamiko Ohshima, Takeshi Ihara, Daichi Taniyama, Satoshi Takeichi, Yoshihito Yagyu, Yoshiaki Suda
    • Organizer
      International Symposium on Transparent Oxide Thin Films for Electronics and Optics TOEO-8
    • Place of Presentation
      Waseda University, Tokyo, Japan
    • Year and Date
      20130513-15
  • [Presentation] 粉体ターゲットを用いた薄膜作製プロセスの解明 ~プローブ計測~2013

    • Author(s)
      川崎仁晴,須田義昭,大島多美子,柳生義人,猪原武士
    • Organizer
      プラズマ・核融合学会
    • Place of Presentation
      九州・沖縄・山口支部、佐世保高専
    • Year and Date
      2013-12-22
  • [Presentation] Study on the TiO2 thin film prepared processes by sputtering deposition using powder target2013

    • Author(s)
      Hiroharu Kawasaki, Daichi Taniyama, Satoshi Takeichi, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Yuki Tanaka, Yoshiaki Suda
    • Organizer
      第26回プラズマ材料科学シンポジウム(SPSM26)
    • Place of Presentation
      九州大学 百年講堂
    • Year and Date
      2013-09-23
  • [Presentation] Preparation of titanium oxide and titanium nitride multilayer thin films using TiN single target2013

    • Author(s)
      Hiroharu Kawasaki, Tamiko Ohshima, Yoshito Yagyu, Takeshi Ihara, Yoshiaki Suda, Sergey Khartsev, Alexander Grishin
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      同志社大学
    • Year and Date
      2013-09-18
  • [Presentation] プローブを用いた粉体スパッタプラズマの計測2013

    • Author(s)
      川崎仁晴,谷山大地、竹市悟志、大島多美子,柳生義人,猪原武士、田中雪、須田義昭
    • Organizer
      2013年 応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学
    • Year and Date
      2013-09-17
  • [Presentation] Electron density measurement for sputtering deposition using metal base powder target2013

    • Author(s)
      H. Kawasaki, T. Ohshima, T. Ihara, K. Arafune, D. Taniyama, Y. Yagyu, Y. Suda
    • Organizer
      The 12th Asia Pacific Physics Conference APPC12
    • Place of Presentation
      International Conference Hall, Makuhari Messe Chiba Japan, D2-PMo-14
    • Year and Date
      2013-07-15

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Published: 2015-03-12  

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